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OwnerJames McLaughlin, Paul Damian Maguire +1inventors
InventorsJames McLaughlin, Paul Damian Maguire, Eric Thomas McAdams
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A method for the modification of a surface of a silver electrode wherein the surface is treated with a chlorine plasma is described. Control of the power, flux density and timing provide the manner to modify the silver surface, and so implant the chlorine atoms and ions into the silver. The present invention provides a method to produce thin-film silver electrodes with a very controlled surface. Such electrodes can provide quantitative quality of measurement. The present invention extends to a method for the modification of a surface of any metal wherein the surface is treated with a plasma.
A method for the modification of a surface of a silver electrode wherein the surface is treated with a chlorine plasma.
A method for the modification of a surface of a metal wherein the surface is treated with a plasma.
A method as claimed in any one of the preceding claims wherein the method is carried out in a plasma chamber.
A method as claimed in any one of the preceding claims wherein the operating power is in the range of 5 to 500 Watts (per cm2).
A method as claimed in any one of the preceding Claims wherein the operating flux density method is within the range 1 to 50 sccms of gas.
A method as claimed in any one of the preceding Claims wherein the operating time is within the range 1 ms to 5 seconds plasma time.
A silver electrode having a silver chloride surface layer provided by plasma modification.
A metal surface having a plasma modified surface.
Dependencies are inferred from the claim text.