Apparatus for evaporation of materials for coating of objects
OwnerPavel Holubar, Mojmir Jilekinventors
Life of this patent
Estimating the term…
Abstract
Apparatus for evaporation of materials for coating of objects by a physical method (PVD) using low voltage electric arc, such apparatus being equipped with a source (4a, 4b, 4) of magnetic field and an anode (3) and a cathode (2a, 2b, 2) of electric arc. At least one cathode (2a, 2b, 2) and at least one source (4a, 4b, 4) of magnetic field can pivot in the coating chamber (1).
Claims16
Apparatus for evaporation of materials for coating of objects by a physical method using low voltage electric arc, such apparatus being equipped with a source of magnetic field and with an anode and a cathode of electric arc, characterized in that at least one cathode (2a, 2b, 2) and at least one source (4a, 4b, 4) of magnetic field can pivot with respect to one another in a coating chamber (1).
Dependencies are inferred from the claim text.