Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsLeon Lin, Tom Fan, Steven Chen, Vito Lee, Yu-Hsiang Wu
Estimating the term…
A cold trap having improved trapping efficiency for particles, particularly ammonium chloride fine powder particles. The cold trap has a dual-stage design, including an upstream stage fitted with at least one trap plate and a downstream stage fitted with a typically cup- or cone-shaped trap core in which is provided a conically-spiraled water cooling coil. A decreasing temperature gradient is provided along the length of the cold trap, such that exhaust gases flowing through the cold trap are gradually cooled and ammonium chloride or other particles which form from the gas are trapped by the trap plate or plates and collect in the trap core. The exhaust gases exiting the downstream end of the trap core are substantially or completely devoid of particles.
A cold trap for removing particles from a gas, comprising:
A cold trap for removing particles from a gas, comprising:
A method of removing particles from a gas, comprising the steps of:
Dependencies are inferred from the claim text.