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US 2004/0064283 A1Published application
Control of instruments
AssigneeCarl Zeiss NTS GmbH
InventorsDirk Preiksas, David Ralph Hubbard
Life of this patent
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AssigneeCarl Zeiss NTS GmbH
InventorsDirk Preiksas, David Ralph Hubbard
Estimating the term…
An instrument, in particular an electron microscope, has at least one user controllable operating parameter and at least one further operating parameter having a required value at least partially dependent on that of the user controllable parameter. A number of possible values of the further operating parameter are stored in a memory and each stored value corresponds to a respective possible value of the user controllable parameter. Selecting one of said stored possible values causes the instrument to be controlled accordingly. There is also provided a tuner for enabling the user to alter the selected value and updating apparatus for updating the memory accordingly, so that the adjusted value of the further operating parameter is subsequently selected from the memory if the same value of the user controllable parameter is then chosen again.
An instrument having a user controllable operating parameter and at least one further operating parameter having a required value at least partially dependent on that of said user controllable parameter, the instrument also having a memory for storing a number of possible values of the further operating parameter, each said value corresponding to a respective possible value of the user controllable parameter, a selector for selecting one of said stored possible values for the further parameter and controlling the instrument accordingly, a tuner for enabling a user to alter the selected value, and updating apparatus for updating the memory accordingly, so that the adjusted value of the further operating parameter is selected from the memory if the same value of user controllable parameter is then chosen again.
A scanning charged particle beam instrument having a gun for generating the beam of charged particles, a plurality of apertures through any selected one of which the beam may pass, accelerating electrode means which a voltage is applied to accelerate the particles away from the gun, and alignment means for directing the beam through the selected aperture, wherein the instrument includes a memory in which are stored values for the settings of alignment means dependent on the voltage applied to the accelerating electrode and the choice of aperture.
Dependencies are inferred from the claim text.