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AssigneeAnalog Devices, Inc.
InventorsChang-Han Yun, Lawrence E. Felton, Maurice S. Karpman, John A. Yasaitis, Michael W. Judy, Colin Gormley
Estimating the term…
An intermediate electrode layer is used to fabricate an integrated micro-electromechanical system. An intermediate electrode layer is formed on an integrated circuit wafer. The intermediate electrode layer places drive electrodes a predetermined height above the surface of the integrated circuit wafer. A micro-electromechanical system wafer having micromachined optical mirrors is bonded to the integrated circuit wafer such that the drive electrodes are positioned a predetermined distance from the optical mirrors.
A method for fabricating an integrated micro-electromechanical system, the method comprising:
An apparatus comprising:
An apparatus comprising:
Dependencies are inferred from the claim text.