Semiconductor device
AssigneeHitachi, Ltd.
InventorsToshiaki Minami, Toshiyuki Sakuta, Makoto Kuwata
Life of this patent
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AssigneeHitachi, Ltd.
InventorsToshiaki Minami, Toshiyuki Sakuta, Makoto Kuwata
Estimating the term…
In a semiconductor device having the upmost wiring layer comprised of aluminum and the wiring layer immediately below it comprised of copper, the upmost wiring layer is made thicker than the wiring layer immediately below it so that the upmost wiring layer is lower in sheet resistance than the wiring layer immediately below it. Multiple ring power lines VR and pads PD are formed of the upmost wiring layer, and the ring power lines VR and the pads PD are connected respectively through power lines VLB1 of the upmost wiring layer. Consequently, the voltage drop on the power feed path from the pads PD to the ring power lines VR can be reduced and the power conduction from the pads PD to the ring power lines VR can be stabilized.
A semiconductor device having a first circuit area on a main surface of a semiconductor chip and a plurality of wiring layers which are formed on said main surface of said semiconductor chip,
A semiconductor device having a first circuit area on a main surface of a semiconductor chip and a plurality of wiring layers which are formed on said main surface of said semiconductor chip,
A semiconductor device having a first circuit area on a main surface of a semiconductor chip and a plurality of wiring layers which are formed on said main surface of said semiconductor chip,
A semiconductor device having a first circuit area on a main surface of a semiconductor chip and a plurality of wiring layers which are formed on said main surface of said semiconductor chip,
A semiconductor device having a first circuit area on a main surface of a semiconductor chip and a plurality of wiring layers which are formed on said main surface of said semiconductor chip,
A semiconductor device having a plurality of wiring layers formed on a semiconductor chip, a upmost wiring layer, which is comprised of aluminum as main element and includes first lines, being made lower in sheet resistance than said wiring layer which is immediately below the upmost wiring layer, is comprised of copper as main element, and includes second lines.
A semiconductor device having a plurality of external terminals which are formed of a wiring layer with a lowest sheet resistance among a plurality of wiring layers formed on a semiconductor chip, and a plurality of power lines which are laid to run around an outer edge of a first circuit area of said semiconductor chip, said external terminals being connected directly to said power lines respectively through said wiring layer with said lowest sheet resistance.
A semiconductor device having a plurality of wiring layers formed on a semiconductor chip, a upmost wiring layer being lowest in sheet resistance among all wiring layers and having a layout of only external terminals and power lines.
Dependencies are inferred from the claim text.