Microrelays and microrelay fabrication and operating methods

A method of providing a microrelay switch function comprising:

• providing a microrelay having:
• an actuator having first and second actuator surfaces and first and second conductive regions electrically isolated from each other;
• a first cap having a first cap surface adjacent the first actuator surface, the first cap having third, fourth and fifth conductive regions electrically isolated from each other, the third conductive region being adjacent the first conductive region, the fourth and fifth conductive regions being adjacent the second conductive region;
• a second cap having a second cap surface adjacent the second surface of the actuator, the second cap having a sixth conductive region adjacent the first conductive region;
• the actuator being deflectable in a first direction to allow the second conductive region to contact the fourth and fifth conductive region, and the first and third conductive regions to not electrically contact each other;
• the actuator being deflectable in a second direction opposite the first direction so that the first and sixth regions move closer without electrically contacting each other;
• a) when a relay switch is to be closed, providing voltages on the first, third and sixth regions so that the actuator is attracted toward the first cap and not the second cap to put the second region in electrical contact with the fourth and fifth regions;
• and,
• b) when the relay switch is to be opened, providing voltages on the first, third and sixth regions so that the actuator is attracted toward the second cap and not the first cap to prevent the second region from making electrical contact with the fourth and fifth regions.