Microelectromechanical heating apparatus and fluid preconcentrator device utilizing same
AssigneeThe Regents of the University of Michigan
InventorsWei-Cheng Tian, Stella W. Pang, Edward T. Zellers
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AssigneeThe Regents of the University of Michigan
InventorsWei-Cheng Tian, Stella W. Pang, Edward T. Zellers
Estimating the term…
A microelectromechanical heating apparatus and fluid preconcentrator device utilizing same wherein heating elements of the apparatus are sized and spaced to substantially uniformly heat a heating chamber within a heater of the apparatus. Tall, thermally-isolated heating elements are fabricated in Si using high aspect ratio etching technology. These tall heating elements have large surface area to provide large adsorbent capacity needed for high efficiency preconcentrators in a micro gas chromatography system (μGC). The tall heating elements are surrounded by air gaps to provide good thermal isolation, which is important for a low power preconcentrator in the μGC system.
A microelectromechanical-heating apparatus comprising:
A microelectromechanical heating apparatus for a microanalytical system, the apparatus comprising:
A microelectromechanical heating apparatus for a microsensing system, the apparatus comprising:
A microelectromechanical, fluid preconcentrator device which sorbs at least one fluid species of interest from a fluid over time and releases the at least one fluid species of interest upon demand, the device comprising:
Dependencies are inferred from the claim text.