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US 2004/0056009 A1Published application
Multiple beam micro-machining system and method
AssigneeOrbotech Ltd.
InventorsAbraham Gross, Zvi Kotler, Eliezer Lipman
Life of this patent
Estimating the term…
Abstract
A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.
Claims728
A system for delivering energy to a substrate, comprising:
- at least one dynamically directable source of radiant energy providing a plurality of beams of radiation, each beam propagating in a dynamically selectable direction;
- and
- a plurality of independently positionable beam steering elements, some of said beam steering elements receiving said plurality of beams and directing them to selectable locations on said substrate.
A system for delivering energy to a substrate, comprising:
- at least one source of radiant energy providing a beam of radiation;
- a beam splitter operative to split said beam into a plurality of sub-beams, each sub-beam propagating in a selectable direction;
- and
- a plurality of independently positionable beam steering elements, some of said steering elements receiving said plurality of sub-beams and directing them to selectable locations on said substrate.
1 more element
A system for delivering energy to a substrate, comprising:
- at least one source of radiant energy providing a beam of radiation;
- and
- a beam splitter disposed between said source of radiant energy and said substrate, said beam splitter operative to split said beam into a selectable plurality of sub-beams.
A system for delivering energy to a substrate, comprising:
- at least one source of radiant energy providing a beam of radiation;
- and
- an opto-electronic multiple beam generator disposed between said source of radiant energy and said substrate and being operative to generate at least two sub-beams from said beam and to select an energy density characteristic of each sub-beam.
A system for micromachining a substrate, comprising:
- at least one source of pulsed radiant energy providing a pulsed beam of radiation along an optical axis, said pulsed beam including multiple pulses separated by a temporal pulse separation;
- and
- a multiple beam, selectable and changeable angle output beam splitter disposed between said source of radiant energy and said substrate and being operative to output a plurality of sub-beams at a selected angle relative to said optical axis which angle is changeable in an amount of time that is less than said temporal pulse separation.
A system for micromachining a substrate, comprising:
- at least one source of pulsed radiant energy providing a pulsed beam of radiation said pulsed beam including multiple pulses separated by a temporal pulse separation;
- a beam splitter disposed between said source of radiant energy and a substrate and being operative to output a plurality of sub-beams at selectable angles which are changeable;
- and
- a plurality of selectable spatial orientation deflectors, ones of said selectable spatial orientation deflectors being operative to change a spatial orientation in an amount of time that is greater than said temporal pulse separation, some of said spatial orientation deflectors being arranged to receive said sub-beams and to direct said sub-beams to said substrate.
1 more element
A system for micromachining a substrate, comprising:
- at least one source of radiant energy providing a beam of radiation;
- a beam splitter operative to split said beam into a selectable number of output beams, said output beams having an energy property functionally related to said selectable number;
- and
- at least one beam steering element receiving at least one output beam and directing said at least one output beam to micro-machine a portion of said substrate.
1 more element
A system for delivering energy to a substrate, comprising:
- at least one source of radiant energy providing a plurality of beams of radiation propagating in a plane;
- and
- a plurality of deflectors receiving said plurality of beams and deflecting at least some of said beams to predetermined locations outside said plane.
A system for delivering energy to a substrate, comprising:
- at least one source of radiant energy providing a beam of radiation;
- a beam splitter operative to receive said beam and to output a plurality of sub-beams propagating in a plane;
- and
- a plurality of deflectors receiving said plurality of sub-beams and deflecting at least some of said plurality of sub-beams to predetermined locations outside said plane.
1 more element
A system for delivering energy to a substrate, comprising:
- at least one source of radiant energy providing a plurality of beams of radiation;
- a first plurality of selectably positionable deflectors;
- and
- a second plurality of selectably positionable deflectors,
- said first plurality of beams being directed onto said first plurality of selectably positionable deflectors during a first time interval for directing said plurality of beams onto a first plurality of locations;
- said second plurality of selectably positionable deflectors being selectably positioned during said first time interval;
- and
- said first plurality of beams of radiation being directed onto said second plurality of selectable positionable deflectors during a second time interval for directing said plurality of beams onto a second plurality of locations.
5 more elements
A system for delivering energy to a substrate, comprising:
- at least one radiant beam source providing at least one beam of radiation;
- at least first and second deflectors disposed to receive said at least one beam to deliver said beam to respective at least first and second at least partially overlapping locations on said substrate.
Laser micro-machining apparatus, comprising:
- at least one radiant beam source providing a plurality of radiation beams;
- a plurality of independently positionable deflectors arranged to be disposed between said at least one radiant beam source and a substrate to be micro-machined, said plurality of independently positionable deflectors being operative to independently deliver said at least one radiation beam to selectable locations on said substrate;
- and
- a focusing lens disposed between said at least one radiant beam source and said substrate, said focusing lens receiving said plurality of radiation beams and being operative to simultaneously focus said beams onto said selectable locations on said substrate.
1 more element
An acousto-optic device, comprising:
- a source of radiant energy providing a beam of radiation along an optical axis;
- an optical element receiving said beam;
- and
- a transducer associated with said optical element, said transducer forming in said optical element an acoustic wave simultaneously having different acoustic frequencies, said optical element operative to output a plurality of sub-beams at different angles with respect to said optical axis.
1 more element
A system for micro-machining a substrate, comprising:
- a laser beam generator providing a laser beam;
- a beam splitter receiving said laser beam and splitting said laser beam into a first number of output beams and a second number of output beams;
- a first plurality of beam steering elements directing said first number of output beams to form at least one opening in a first layer of a multi-layered substrate;
- and
- a second plurality of beam steering elements directing ones of said second number of output beams to remove selected portions of a second layer of said multi-layered substrate via said at least one opening.
2 more elements
A method for delivering energy to a substrate, comprising:
- providing a plurality of beams of radiation;
- propagating each of said plurality of beams in a dynamically selectable direction;
- and
- directing said plurality of beams to selectable locations on said substrate.
1 more element
A method for delivering energy to a substrate, comprising:
- providing a beam of radiation;
- splitting said beam into a plurality of sub-beams;
- propagating each of said plurality of sub-beams in a selectable direction;
- and
- directing said plurality of sub-beams to selectable locations on said substrate.
2 more elements
A method for delivering energy to a substrate, comprising:
- providing a beam of radiation;
- splitting said beam into a plurality of sub-beams, said plurality of sub-beams comprised of a selectable number of sub-beams.
A method for delivering energy to a substrate, comprising:
- providing a beam of radiation using at least one source of radiant energy;
- disposing an opto-electronic multiple beam generator between said at least one source of radiant energy and said substrate;
- generating at least two sub-beams from said beam;
- and
- selecting an energy density characteristic of each sub-beam.
2 more elements
A method for micromachining a substrate, comprising:
- providing a pulsed beam of radiation along an optical axis, said pulsed beam including multiple pulses separated by a temporal pulse separation;
- and
- splitting said beam into a plurality of sub-beams;
- and
- outputting said plurality of sub-beams at a selected angle relative to said optical axis which angle is changeable in an amount of time that is less than said temporal pulse separation.
2 more elements
A method for micromachining a substrate, comprising:
- providing a pulsed beam of radiation, said pulsed beam including multiple pulses separated by a temporal pulse separation;
- splitting said beam into a plurality of sub-beams;
- outputting said plurality of sub-beams at selectable angles which are changeable;
- and
- receiving said sub-beams, a plurality of selectable spatial orientation deflectors;
- changing a spatial orientation in an amount of time that is greater than said temporal pulse separation, ones of said selectable spatial orientation deflectors;
- and
- directing said sub-beams to said substrate, some of said spatial orientation deflectors.
5 more elements
A method for micromachining a substrate, comprising:
- providing a beam of radiation;
- splitting said beam into a selectable number of output beams, said output beams having an energy property functionally related to said selectable number;
- receiving at least one of said output beams, at least one beam steering element;
- and
- directing said at least one of said output beams to micro-machine a portion of said substrate.
2 more elements
A method for delivering energy to a substrate, comprising:
- providing a plurality of beams of radiation propagating in a plane;
- receiving said plurality of beams, a plurality of deflectors;
- and
- deflecting at least some of said beams to predetermined locations outside said plane.
1 more element
A method for delivering energy to a substrate, comprising:
- providing a beam of radiation;
- splitting said beam into a plurality of sub-beams propagating in a plane;
- receiving said plurality of sub-beams, a plurality of deflectors;
- and
- deflecting at least some of said plurality of sub-beams to predetermined locations outside said plane.
2 more elements
A method for delivering energy to a substrate, comprising:
- directing a plurality of beams of radiation onto a first plurality of selectably positionable deflectors during a first time interval for directing said plurality of beams onto a first plurality of locations;
- during said first time interval, selectably positioning a second plurality of selectably positionable deflectors;
- and
- during a second time interval, directing said plurality of beams of radiation onto said second plurality of selectably positionable deflectors for directing said plurality of beams onto a second plurality of locations.
1 more element
A method for delivering energy to a substrate, comprising:
- providing at least one beam of radiation;
- receiving said at least one beam, at least one first deflector and at least one second deflector;
- disposing said at least one first deflector and said at least one second deflector to deliver said beam to respective at least first and second at least partially overlapping locations on said substrate.
A method for laser micro-machining comprising:
- providing a plurality of radiation beams;
- independently deflecting each of said plurality of beams to selectable locations on a substrate to be micro-machined;
- and
- focusing said plurality of beams onto said selectable locations on said substrate.
1 more element
An acousto-optic method comprising:
- providing a beam of radiation along an optical axis;
- receiving said beam, an optical element;
- associating a transducer with said optical element;
- forming in said optical element an acoustic wave simultaneously having different acoustic frequencies;
- and
- outputting a plurality of sub-beams at different angles with respect to said optical axis.
3 more elements
A method for micro-machining a substrate, comprising:
- providing a laser beam to a beam splitter device;
- splitting said laser beam into a first number of output beams and directing said first number of output beams to form at least one opening in a first layer of a multi-layered substrate;
- and then
- splitting said laser beam into a second number of output beams and directing ones of said second number of output beams to remove selected portions of a second layer of said multi-layered substrate via said at least one opening.
1 more element
Dependencies are inferred from the claim text.