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US 2004/0055876 A1Published application
Cam driven paddle assembly for a plating cell
AssigneeInternational Business Machines Corporation
InventorsRobert M. Browne, Donald G. Allen, Hank Reinstein, Todd Thomas
Life of this patent
Estimating the term…
Abstract
The present invention overcomes the drawbacks and limitations described above by providing a paddle assembly having a paddle that moves in a bidirectional fashion for agitating solution in a container of a plating cell. A follower is coupled to the paddle. The follower engages a rotatable cam and is propelled along the cam as the cam rotates. A drive mechanism rotates the cam.
Claims20
A paddle assembly, comprising:
- (a) a paddle, the paddle moving in a bidirectional fashion for agitating solution in a container of a plating cell;
- (b) a follower coupled to the paddle;
- (c) a rotatable cam, the follower engaging the cam, the follower being propelled along the cam as the cam rotates;
- and
- (d) a drive mechanism for rotating the cam.
2 more elements
An electroplating cell assembly, comprising:
- (a) a container;
- (b) a paddle positioned in the container, the paddle moving in a bidirectional fashion across a wafer in the container for agitating solution in the container;
- (c) a slider coupled to the paddle;
- (d) a first guide oriented parallel to a direction of movement of the paddle, the slider engaging the first guide for following therealong;
- (e) a follower coupled to the paddle;
- (f) a rotatable cylindrically shaped cam, the follower engaging the cam, the follower being propelled along the cam as the cam rotates;
- and
- (g) a drive mechanism for rotating the cam.
5 more elements
Dependencies are inferred from the claim text.