Manufacturing method of ceramic device using mixture with photosensitive resin

A method for manufacturing a ceramic device using a mixture with photosensitive resin comprising the steps of:

• providing a ceramic substrate;
• forming a lower electrode on said substrate using a mixture of photosensitive resin and metal;
• forming a piezoelectric/electrostrictive layer on said lower electrode using a mixture of photosensitive resin and piezoelectric/electrostrictive ceramic;
• forming an upper electrode on said piezoelectric/electrostrictive layer using a mixture of photosensitive resin and metal;
• and
• patterning said lower electrode, said piezoelectric/electrostrictive layer, and said upper electrode by light exposure after masking said upper electrode in desired pattern.

A method for manufacturing a ceramic device using a mixture with photosensitive resin comprising the steps of:

• providing a ceramic substrate;
• forming a lower electrode-on said substrate;
• forming a piezoelectric/electrostrictive layer on said lower electrode using a mixture of photosensitive resin and piezoelectric/electrostrictive ceramic;
• masking and exposing said piezoelectric/electrostrictive layer to pattern it;
• forming an upper electrode on said piezoelectric/electrostrictive layer using a mixture of photosensitive resin and metal;
• and
• masking and exposing said upper electrode to pattern it.

A method for manufacturing a ceramic device using a mixture with photosensitive resin comprising the steps of:

• providing a ceramic substrate;
• forming a lower electrode on said substrate using a mixture of photosensitive resin and metal;
• masking and exposing said lower electrode to pattern it.
• forming a piezoelectric/electrostrictive layer on said lower electrode using a mixture of photosensitive resin and piezoelectric/electrostrictive ceramic;
• masking and exposing said piezoelectric/electrostrictive layer to pattern it;
• forming an upper electrode on said piezoelectric/electrostrictive layer using a mixture of photosensitive resin and metal;
• and
• exposing said upper electrode to pattern it.

A method for manufacturing a ceramic device using a mixture with photosensitive resin comprising the steps of:

• providing a metal substrate;
• forming a piezoelectric/electrostrictive layer on said metal substrate using a mixture of photosensitive resin and piezoelectric/electrostrictive ceramic;
• forming an upper electrode on said piezoelectric/electrostrictive layer using a mixture of photosensitive resin and metal;
• and patterning said piezoelectric/electrostrictive layer and said upper electrode by light exposure after masking said upper electrode in desired pattern.

A method for manufacturing a ceramic device using a mixture with photosensitive resin comprising the steps of:

• providing a metal substrate;
• forming a piezoelectric/electrostrictive layer on said metal substrate using a mixture of photosensitive resin and piezoelectric/electrostrictive ceramic;
• masking and exposing said piezoelectric/electrostrictive layer to pattern it;
• forming an upper electrode on said piezoelectric/electrostrictive layer using a mixture of photosensitive resin and metal;
• and
• masking and exposing said upper electrode to pattern it.