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AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsSatoshi Murakami, Ritsuko Nagao, Masayuki Sakakura, Misako Nakazawa, Noriko Miyagi, Hisao Ikeda, Kaoru Tsuchiya, Ayumi Ishigaki, Masahiro Takahashi, Noriyuki Matsuda, Hiroki Ohara
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An object of the present invention is to reduce or eliminate the occurrence of a variety of failure modes (shrink, dark spot and the like) in a light emitting element having an organic compound. The present invention suppresses a non-light emitting region generated immediately after a light emitting element has been fabricated by making the barrier 111 have a curved surface having a radius of curvature at the upper portion or lower portion, washes the surface of the anode 110 with a porous sponge in order to remove minute grains dotted on the surface of the anode, and suppresses the occurrence of a shrink by performing the vacuum heating in order to remove absorbed water of a whole of the substrate on which a TFT and a barrier have been provided immediately before the layer 112 containing an organic compound is formed.
A method of fabricating a light emitting device having a light emitting element having an anode, a layer containing an organic compound, which is in contact with said anode, and a cathode which is in contact with said layer containing an organic compound, said method comprising the steps of:
A method of fabricating a light emitting device having a light emitting element having an anode, a layer containing an organic compound which is in contact with said anode and a cathode which is in contact with said layer containing an organic compound, said method comprising the steps of:
A method of fabricating a light emitting device having a light emitting element having an anode, a layer containing an organic compound which is in contact with said anode and a cathode which is in contact with said layer containing an organic compound, said method comprising the steps of:
A method of fabricating a light emitting device having a light emitting element having an anode, a layer containing an organic compound which is in contact with said anode, and a cathode which is in contact with said layer containing an organic compound, said method comprising the steps of:
A method of fabricating a light emitting device having a light emitting element having an anode, a layer containing an organic compound which is in contact with said-anode and a cathode which is in contact with said layer containing an organic compound, said method comprising the steps of:
A method of manufacturing a light emitting device having a light emitting element comprising an anode, a layer containing an organic compound in contact with said anode, a cathode in contact with said layer containing an organic compound, said method comprising:
A method of manufacturing a light emitting device having a light emitting element comprising an anode, a layer containing an organic compound in contact with said anode, a cathode in contact with said layer containing an organic compound, said method comprising:
Dependencies are inferred from the claim text.