Method for producing nonvolatile semiconductor memory device and the device itself

Abstract

Method for producing a nonvolatile semiconductor memory device includes forming a first insulating film on a semiconductor substrate, forming a floating gate electrode material film on the first insulating film, forming a second insulating film on the floating gate electrode material film, forming a control gate electrode material film on the second insulating film, forming a first mask film on the control gate electrode material film, the first mask film having slits extending along a first direction, forming sidewalls on the sides of the first mask film in the slits, and etching the control gate electrode material film, the second insulating film and the floating gate electrode material film using the first mask film and the sidewalls as a mask so as to form memory cells each of which includes a floating gate electrode and a control gate electrode.

Dependencies are inferred from the claim text.