Sealing apparatus having a single groove
AssigneeTokyo Electron Limited
InventorSteven T. Fink
Life of this patent
Estimating the term…
Abstract
A sealing apparatus includes a sealing arrangement and a groove in a base. The sealing arrangement may comprise an o-ring and a grounding gasket where both the o-ring and the grounding gasket partially protrude in a longitudinal direction from the groove. Thus, the grounding gasket, which is equipped with ends that can be pulled out of the groove, can be removed from the groove by a pulling force. This leaves the o-ring accessible for removal or maintenance at a much lower cost in terms of manufacturing and operational costs. The sealing arrangement may also include inner and outer o-rings which seal a fluid flow from the atmosphere.
Claims22
A sealing apparatus, comprising:
- a first part having a first surface configured to cooperate with a second surface of a second part;
- a groove formed in the first surface;
- a first o-ring, configured to seal a first fluid in a first region from a second fluid in a second region, while contained in the groove;
- and
- a second o-ring in continuous contact with the first o-ring while contained in the groove.
A sealing apparatus, comprising:
- a first part having a first surface configured to cooperate with a second surface of a second part;
- a groove formed in the first surface;
- an o-ring, configured to seal a first area between the first and second surfaces from a second area exterior to the first area, while contained in the groove;
- and
- a grounding gasket, configured to electrically couple the first and second surfaces, while contained in the groove adjacent the o-ring.
Dependencies are inferred from the claim text.