Ceramic heater

A ceramic heater comprising a ceramic plate and a heating element formed on a surface of said ceramic plate or inside thereof, said ceramic heater being equipped with:

• a temperature-measuring element for measuring the temperature of said ceramic plate;
• a control unit for supplying electric power to said heating element;
• a memory unit for memorizing the data of a temperature measured by said temperature-measuring element;
• and
• an operation unit for calculating electric power required for said heating element from said temperature data,
• wherein:
• a bottomed hole is made, being directed from the opposite side to a heating surface for heating an object to be heated, toward the heating surface;
• the bottom of said bottomed hole is formed relatively nearer to the heating surface than the heating element;
• and a temperature-measuring element is set up in said bottomed hole.