Method and apparatus for supporting a substrate
OwnerGerald Pham-Van-Diep, John E. Moriniinventors
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Abstract
An apparatus and method for performing operations on an electronic substrate includes a frame, a transportation system that moves the substrate through the apparatus, a substrate support system coupled to the frame that supports the substrate during a manufacturing operation on the substrate, wherein the substrate support system includes a deformable material, and a device coupled to the frame that performs an operation on a surface of the substrate. Manufacturing operations are performed on the substrate while the substrate is substantially evenly supported by the deformable material.
Claims20
An apparatus for performing operations on at least one surface of an electronic substrate having a first surface and a second surface, the apparatus comprising:
- a frame;
- a transportation system that moves the substrate through the apparatus;
- a substrate support system coupled to the frame that supports the substrate during an operation on the substrate, wherein the substrate support system includes a deformable material;
- and
- a device coupled to the frame that performs an operation on a surface of the substrate.
A method of performing an operation on an electronic substrate, the method comprising:
- loading the substrate into a processing machine;
- supporting the substrate with a deformable material that conforms to a surface of the electronic substrate;
- performing a manufacturing operation on the substrate;
- and
- removing the substrate from the processing machine.
An apparatus for supporting an electronic substrate during a manufacturing operation, the apparatus comprising:
- a frame;
- means, coupled to the frame, for supporting electronic substrates, including a deformable material which conforms to a surface of the substrate to be supported during manufacturing.
Dependencies are inferred from the claim text.