Manufacturing integrated circuits

A phase-shifted mask produced by a process that includes the steps of:

• providing, by a facilitator on behalf of a party that desires a mask, a subsidy for production of said phase-shifted mask;
• paying for manufacture of said phase-shifted mask using compensation that includes said subsidy from said facilitator;
• causing a mask maker to manufacture said phase-shifted mask for said compensation;
• and
• receiving, by the facilitator from said party, compensation for said subsidy based on one or more factors including a factor that reflects market success of integrated circuits produced using said phase-shifted mask.

An integrated circuit produced by a process that includes the steps of:

• providing, by a facilitator on behalf of a party, a subsidy for production of said phase-shifted mask;
• paying for manufacture of said phase-shifted mask using compensation that includes said subsidy from said facilitator;
• causing a mask maker to manufacture said phase-shifted mask for said compensation;
• manufacturing said integrated circuit based on said phase-shifted mask;
• and
• receiving, by the facilitator from said party, compensation for said subsidy based on one or more factors including a factor that reflects market success of said integrated circuit.

A method of manufacturing masks using a particular technology when said particular technology is preferable to but cost more than one or more alternative technologies, the method comprising the steps of:

• providing, from a facilitator on behalf of a set of one or more parties that desire masks, subsidies for production of masks using said particular technology;
• paying for manufacture of said masks using compensation that includes said subsidies from said facilitator;
• causing a set of one or more mask makers to manufacture said masks using said particular technology for said compensation;
• and
• receiving, by said facilitator from said set of one or more parties, compensation for said subsidies based on one or more factors including a factor that reflects market success of integrated circuits produced using said masks.

A method of manufacturing products using a particular technology when said particular technology is preferable to but cost more than one or more alternative technologies, the method comprising the steps of:

• providing, from a facilitator on behalf of a set of one or more parties, subsidies for using said particular technology to manufacture products;
• paying for manufacture of said products using compensation that includes said subsidies from said facilitator;
• causing products to be manufactured for said compensation using said particular technology;
• and
• receiving, by said facilitator from said set of one or more parties, compensation for said subsidies based on one or more factors including a factor that reflects market success of said products.