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US 2004/0005730 A1Published application
Controller module for a semiconductor manufacturing device
OwnerBu-Jin Koinventor
Life of this patent
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Abstract
A controller module for a semiconductor manufacturing device wherein the controller module has a plurality of controllers comprises a control box disposed at an outside of the semiconductor manufacturing device wherein each of the plurality of controllers is separately installed into the control box, and a movable control box support wherein the control box is loaded on the control box support and slides on the control box support.
Claims4
A controller module for a semiconductor manufacturing device, wherein the controller module has a plurality of controllers, comprising:
- a control box disposed at an outside of the semiconductor manufacturing device,
- wherein each of the plurality of controllers is separately installed into the control box;
- and
- a movable control box support,
- wherein the control box is loaded on the control box support and slides on the control box support.
2 more elements
Dependencies are inferred from the claim text.