Oxime derivatives and the use thereof as latent acids

A chemically amplified photoresist composition comprising

• (a) a compound which cures upon the action of an acid or a compound whose solubility is increased upon the action of an acid;
• and
• (b) as photosensitive acid donor, at least one compound of the formula I, II, III, IV, V, VI or VII
• 82 83
• wherein (R1 is C1-C18alkysulfonyl, C1-C10haloalkysulfonyl, camphorylsulfonyl, phenyl-C1-C3alkylsulfonyl, C3-C12cycloalkylsulfonyl, phenylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl, wherein the groups cycloalkyl, phenyl, naphthyl, anthracyl and phenanthryl of the radicals C3-C12C3-C12cycloalkylsulfonyl, phenyl-C1-C3alkylsulfonyl, phenylsulfonyl, naphthylsulfonyl, anthracylsulfonyl and phenanthrylsulfonyl are unsubstituted or substituted by one or more halogen, C1-C4haloalkyl, CN, NO2, C1-C16alkyl, phenyl, C1-C4alkylthio, OR4, (CO)OR7, C1-C4alkyl—(CO)O—, R7OSO2— and/or —NR5R6;
• or R1 is C2-C6haloalkanoyl, halobenzoyl, or a group
• 84
• X1, X2 and X3 independently of each other are O or S;
• R2 is halogen or C1-C10haloalkyl;
• R3 is phenylenedisulfonyl, naphthylenedisulfonyl,
• 85
• diphenylenedisulfonyl, or oxydiphenylenedisulfonyl, wherein these radicals are unsubstituted or substituted by C1-C12alkyl;
• or R3 is C2-C12alkylenedisulfonyl;
• Ar1 is a direct bond, unsubstituted C1-C12alkylene, C1-C12alkylene which is substituted by C3-C30cycloalkyl;
• or Ar1 is C3-C30cycloalkylene, C1-C8haloalkylene, C2-C12alkenylene, C4-C8-cycloalkenylene, C6-C12bicycloalkenylene;
• or Ar1 is phenylene, which is unsubstituted or substituted by one or more C1-C12alkyl, C1-C4haloalkyl, phenyl-C1-C3-alkyl, halogen, phenyl, OR4, NR5R6, SR7, SOR7, and/or SO2R7, optionally the substituents OR4, SR7 and NR5R6 form 5- or 6-membered rings, via the radicals R4, R5, R6 and/or R7, with further substituents on the phenylene ring or with one of the carbon atoms of the phenylene ring;
• or Ar1 is naphthylene, anthracylene or phenanthrylene ring, wherein the radicals naphthylene, anthracylene and phenanthrylene are unsubstituted or substituted by C1-C6alkyl, phenyl, OR4, NR5R6, SR7, SOR7, and/or SO2R7, optionally the substituents OR4, SR7 and NR5R6 form 5- or 6-membered rings, via the radicals R4, R5, R6 and/or R7 with further substituents on the naphthylene, anthracylene or phenanthrylene ring or with one of the carbon atoms of the naphthylene, anthracylene or phenanthrylene ring;
• or Ar1 is a heteroarylene ring which is unsubstituted or substituted by C1-C6alkyl, phenyl, OR4, NR5R6, SR7, SOR7, and/or SO2R7, optionally the substituents OR4, SR7 and NR5R6 form 5- or 6-membered rings, via the radicals R4, R5, R6 and/or R7 with further substituents on the heteroarylene ring or with one of the carbon atoms of the heteroarylene ring;
• wherein all radicals Ar1 optionally additionally are substituted by a group having a —O—C-bond or a —O—Si-bond which cleaves upon the action of an acid;
• A1, A2, A3, A4, A5, A6, A7, A8, A9, A10, A11 and A12 independently of each other are a direct bond, —O—, —S—, —NR4—, —CO—, —O(CO)—, —S(CO)—, —NR4(CO)—, —SO—, —SO2—, or —OSO2—;
• or
• A1, A2, A3, A4, A5, A6, A7, A8, A9, A10, A11 and A12 are C1-C12alkylene or phenylene wherein these radicals are unsubstituted or substituted by one or more C1-C12alkyl, C1-C4haloalkyl, halogen, OR4 and/or SR7;
• Y1 is C1-C12alkylene which is substituted by OR4, SR7, halogen and/or phenyl;
• or Y1 is C2-C12alkylene, which is interrupted by one or more —O—, —S—, —NR4—, —O(CO)—, —S(CO)—, —NR4(CO)—, —SO—, —SO2— and/or —OSO2—, and the radical C2-C12alkylene being substituted by OR4, SR7, halogen and/or phenyl;
• Y2 is a trivalent radical of C1-C12alkylene, phenylene, naphthylene, or a heterocyclic ring wherein these radicals are unsubstituted or substituted by C1-C12alkyl, halogen, OR4 and/or SR7;
• or Y2 is
• 86
• Y3 is a tetravalent radical of C1-C12alkylene, phenylene, naphthylene, or a heterocyclic ring wherein these radicals are unsubstituted or substituted by C1-C18alkyl, halogen, OR4 and/or SR7;
• X is halogen;
• R4 is hydrogen, C1-C18aalkyl which is unsubstituted or substituted by phenyl, OH, C1-C12-alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR5R6, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl and/or by C2-C6alkanoyl;
• or R4 is C2-C18alkyl which is interrupted by one or more —O—, and which is unsubstituted or substituted by phenyl, OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR5R6, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl and/or by C2-C6alkanoyl;
• or R4 is phenyl which is unsubstituted or substituted by OH, C1-C18alkyl, halogen and/or C1-C12alkoxy;
• or R4 is C2-C18alkanoyl which is unsubstituted or substituted by phenyl, OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR5R6, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C2-C6alkanoyl;
• or R4 is C1-C18alkylsulfonyl which is unsubstituted or substituted by phenyl, OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR5R6, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C2-C6alkanoyl;
• or R4 is phenylsulfonyl which is unsubstituted or substituted by one or more halogen, C1-C4haloalkyl, CN, NO2, C1-C16alkyl, phenyl, C1-C4alkylthio, C1-C12alkoxy and/or phenoxy;
• or R4 is benzoyl, C1-C10haloalkylsulfonyl, camphorylsulfonyl, phenyl-C1-C3alkylsulfonyl, C3-C12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl;
• R5 and R6 independently of each other are hydrogen or C1-C18alkyl which is unsubstituted or substituted by OH, C1-C4alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylaminocarbonyl, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methyl-phenyl)sulfonyl and/or C1-C6alkanoyl;
• or R5 and R6 are C2-C18alkyl which is interrupted by one or more —O—, and which is unsubstituted or substituted by OH, C1-C4alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylaminocarbonyl, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl and/or C1-C6alkanoyl;
• or R5 and R6 are phenyl which is unsubstituted or substituted by OH, C1-C18alkyl, halogen and/or C1-C12alkoxy;
• or R5 and R6 are C2-C18alkanoyl, which is unsubstituted or substituted by phenyl, OH, C1-C12 alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylaminocarbonyl, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C2-C6alkanoyl;
• or R5 and R6 are C1-C18alkylsulfonyl which is unsubstituted or substituted by phenyl, OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylaminocarbonyl, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C2-C6alkanoyl;
• or R5 and R6 are phenylsulfonyl which is unsubstituted or substituted by one or more halogen, C1-C4haloalkyl, CN, NO2, C1-C16alkyl, phenyl, C1-C4alkylthio, C1-C12alkoxy and/or phenoxy;
• or R5 and R6 are benzoyl, C1-C10haloalkylsulfonyl, camphorylsulfonyl, phenyl-C1-C3alkylsulfonyl, C3-C12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl;
• or R5 and R6, together with the nitrogen atom to which they are attached, form a 5-, 6- or 7-membered ring which may be interrupted by —O— or by —NR4—;
• R7 is hydrogen, phenyl, C1-C18alkyl which is unsubstituted or substituted by phenyl, OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR5R6, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C2-C6alkanoyl;
• or R7 is C2-C18alkyl which is interrupted by one or more —O— and which is unsubstituted or substituted by phenyl, OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR5R6, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C2-C6alkanoyl;
• or R7 is C2-C18alkanoyl which is unsubstituted or substituted by phenyl, OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR5R6, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C2-C6alkanoyl;
• or R7 is C1-C18alkylsulfonyl which is unsubstituted or substituted by phenyl, OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR5R6, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C2-C6alkanoyl;
• or R7 is phenylsulfonyl which is unsubstituted or substituted by one or more halogen, C1-C4haloalkyl, CN, NO2, C1-C16alkyl, phenyl, C1-C4alkylthio, C1-C12alkoxy and/or phenoxy;
• or R7 is benzoyl, C1-C10haloalkylsulfonyl, camphorylsulfonyl, phenyl-C1-C3alkylsulfonyl, C3-C12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl;
• R8, R9 and R10 independently of one another are C1-C6alkyl which is unsubstituted or substituted by halogen;
• or R8, R9 and R10 are phenyl which is unsubstituted or substituted by C1-C4alkyl or halogen;
• or R9 and R10 together are 1,2-phenylene or C2-C6alkylene which is unsubstituted or substituted by C1-C4alkyl or halogen;
• Ar′1 is C1-C12alkyl which is unsubstituted or substituted by C3-C30cycloalkyl;
• or Ar′1 is C3-C30cycloalkyl, C1-C8haloalkyl, C2-C12alkenyl, C4-C8cycloalkenyl, C6-C12bicycloalkenyl, camphoryl;
• or Ar′1 is phenyl, which is unsubstituted or substituted by one or more C1-C12-alkyl, C1-C4haloalkyl, phenyl-C1-C3-alkyl, halogen, phenyl, OR′4, NR′5R′6, SR′7, SOR′7, and/or SO2R′7, optionally the substituents OR′4, SR′7 and NR′5R′6 form 5- or 6-membered rings, via the radicals R′4, R′5, R′6 and/or R′7, with further substituents on the phenyl ring or with one of the carbon atoms of the phenyl ring;
• or Ar′1 is naphthyl, anthracyl or phenanthryl, wherein the radicals naphthyl, anthracyl and phenanthryl are unsubstituted or substituted by C1-C6alkyl, phenyl, OR′4, NR′5R′6, SR′7, SOR′7, and/or SO2R′7, optionally the substituents OR′4, SR′7 and NR′5R′6 form 5- or 6-membered rings, via the radicals R′4, R′5, R′6 and/or R′7 with further substituents on the naphthyl, anthracyl or phenanthryl ring or with one of the carbon atoms of the naphthyl, anthracyl or phenanthryl ring;
• or Ar′1 is a heteroaryl radical which is unsubstituted or substituted by C1-C6alkyl, phenyl, OR′4 , NR′5R′6, SR′7, SOR′7, and/or SO2R′7, optionally the substituents OR′4, SR′7 and NR′5R′6 form 5- or 6-membered rings, via the radicals R′4, R′5, R′6 and/or R′7 with further substituents on the heteroaryl ring or with one of the carbon atoms of the heteroaryl ring;
• and wherein the radicals C1-C12alkyl, phenyl, naphthyl, anthracyl, phenanthryl or the heteroaryl radical optionally are substituted by 1 to 3 of the groups groups
• 87
• and wherein all radicals Ar′1 optionally additionally are substituted by a group having a —O—C-bond or a —O—Si-bond which cleaves upon the action of an acid;
• Ar″1 is phenylene, naphthylene,
• 88
• , diphenylene or oxydiphenylene, wherein these radicals are unsubstituted or substituted by C1-C12alkyl;
• or
• Ar″1 is C1-C12alkylene or
• 89
• wherein all radicals Ar″1 optionally are substituted by 1 to 3 of the groups groups
• 90
• and wherein all radicals Ar″1 optionally additionally are substituted by a group having a —O—C-bond or a —O—Si-bond which cleaves upon the action of an acid;
• D is —O—, —S—, —NR′4—, —CO—, —O(CO)—, —S(CO)—, —NR′4(CO)—, —SO—, —SO2—, or —OSO2—;
• D1 is C1-C12alkylene or C2-C12alkylene, which is interrupted by one or more —O—, —S—, —NR′4—, —CO—, —O(CO)—, —S(CO)—, —NR′4(CO)—, —SO—, —SO2—, and/or —OSO2;
• and wherein the radicals C1-C12alkylene and C2-C12alkylene optionally are substituted by 1 to 3 of the groups groups
• 91
• R′4 is hydrogen, C1-C18alkyl which is unsubsbtuted or substituted by phenyl, OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR′5R′6, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl and/or by C2-C6alkanoyl;
• or R′4 is C2-C18alkyl which is interrupted by one or more —O—, and which is unsubstituted or substituted by phenyl, OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR′5R′6, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl and/or by C2-C6alkanoyl;
• or R′4 is phenyl which is unsubstituted or substituted by OH, C1-C18alkyl, halogen and/or C1-C12alkoxy;
• or R′4 is C2-C18alkanoyl which is unsubstituted or substituted by phenyl, OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR′5R′6, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C2-C6alkanoyl;
• or R′4 is C1-C18alkylsulfonyl which is unsubstituted or substituted by phenyl, OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR′5R′6, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C2-C6alkanoyl;
• or R′4 is phenylsulfonyl which is unsubstituted or substituted by one or more halogen, C1-C4haloalkyl, CN, NO2, C1-C16alkyl, phenyl, C1-C4alkylthio, C1-C12alkoxy and/or phenoxy;
• or R′4 is benzoyl, C1-C10haloalkylsulfonyl, camphorylsulfonyl, phenyl-C1-C3alkylsulfonyl, C3-C12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl;
• and wherein the radicals C1-C18alkyl, C2-C18alkyl, phenyl, C2-C18alkanoyl, phenylsulfonyl, benzoyl, C1-C10haloalkylsulfonyl, camphorsulfonyl, phenyl-C1-C3alkylsulfonyl, C3-C12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl optionally are substituted by 1 to 3 of the groups groups
• 92
• R′5 and R′6 independently of each other are hydrogen or C1-C18alkyl which is unsubstituted or substituted by OH, C1-C4alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylaminocarbonyl, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methyl-phenyl)sulfonyl and/or C1-C6alkanoyl;
• or R′5 and R′6 are C2-C18alkyl which is interrupted by one or more —O—, and which is unsubstituted or substituted by OH, C1-C4alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylaminocarbonyl, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl and/or C1-C6alkanoyl;
• or R′5 and R′6 are phenyl which is unsubstituted or substituted by OH, C1-C18alkyl, halogen and/or C1-C12alkoxy;
• or R′5 and R′6 are C2-C18alkanoyl, which is unsubstituted or substituted by phenyl, —OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylaminocarbonyl, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C2-C6alkanoyl;
• or R′5 and R′6 are C1-C18alkylsulfonyl which is unsubstituted or substituted by phenyl, OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, phenylamino, phenylaminocarbonyl, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C2-C6alkanoyl;
• or R′5 and R′6 are phenylsulfonyl which is unsubstituted or substituted by one or more halogen, C1-C4haloalkyl, CN, NO2, C1-C16alkyl, phenyl, C1-C4alkylthio, C1-C12alkoxy and/or phenoxy;
• or R′5 and R′6 are benzoyl, C1-C10haloalkylsulfonyl, camphorylsulfonyl, phenyl-C1-C3alkylsulfonyl, C3-C12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl;
• or R′5 and R′6, together with the nitrogen atom to which they are attached, form a 5-, 6- or 7-membered ring which may be interrupted by —O— or by —NR′4—;
• and wherein the radicals C1-C18alkyl, C2-C18alkyl, phenyl, C2-C18alkanoyl, C1-C18alkylsulfonyl, phenylsulfonyl, benzoyl, C1-C10haloalkylsulfonyl, camphorsulfonyl, phenyl-C1-C3alkylsulfonyl, C3-C12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl optionally are substituted by 1 to 3 of the groups groups
• 93
• R′7 is hydrogen, phenyl, C1-C18alkyl which is unsubstituted or substituted by phenyl, OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR′5R′6, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C2-C6alkanoyl;
• or R′7 is C2-C18alkyl which is interrupted by one or more —O—and which unsubstituted or substituted by phenyl, OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR′5R′6, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C2-C6alkanoyl;
• or R′7 is C2-C18alkanoyl which is unsubstituted or substituted by phenyl, OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR′5R′6, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C2-C6alkanoyl;
• or R′7 is C1-C18alkylsulfonyl which is unsubstituted or substituted by phenyl, OH, C1-C12alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, phenylthio, phenylthiocarbonyl, NR′5R′6, C1-C12alkylsulfonyl, phenylsulfonyl, (4-methylphenyl)sulfonyl, and/or by C2-C6alkanoyl;
• or R′7 is phenylsulfonyl which is unsubstituted or substituted by one or more halogen, C1-C4haloalkyl, CN, NO2, C1-C16alkyl, phenyl, C1-C4alkylthio, C1-C12alkoxy and/or phenoxy;
• or R′7 is benzoyl, C1-C10haloalkylsulfonyl, camphorylsulfonyl, phenyl-C1-C3alkylsulfonyl, C3-C12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl;
• and wherein the radicals C1-C18alkyl, C2-C18alkyl, C2-C18lalkanoyl, C1-C18alkylsulfonyl, phenylsulfonyl, benzoyl, C1-C10haloalkylsulfonyl, camphorsulfonyl, phenyl-C1-C3alkylsulfonyl, C3-C12cycloalkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl optionally are substituted by 1 to 3 of the groups
• 94
• provided that at least one of the radicals Ar′1, Ar″1, D1, R′4, R′5, R′6 or R′7 is substituted by 1 to 3 groups
• 95
• L−is F−, Cl−, Br−, I−, HSO4−, 1/2SO42−, NO3−,
• 96
• B(R19)4−, ClO4−, BF4−, PF6−, AsF6− or SbF6−;
• R15, R16, R17 and R18 independently of each other are hydrogen or phenyl which is unsubstituted or substituted by one or more C1-C12alkyl, halogen, —NO2, —CN, phenyl, C1-C4-alkoxy, hydroxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, C1-C4alkylthio, phenylthio, C2-C12alkanoyl, C2-C12alkanoyloxy, benzoyl and/or benzoyloxy;
• or R15, R16, R17 and R18 are C1-C12alkyl, C2-C12alkyl which is interrupted by one or more —O—, and wherein the radicals C1-C12alkyl and C2-C12alkyl are unsubstituted or substituted by one or more halogen, hydroxy, —NO2, —CN, phenyl, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, C1-C4alkylthio, phenylthio, C2-C12alkanoyl, C2-C12alkanoyloxy, benzoyl and/or benzoyloxy;
• or R15 and R16, if appropriate together with C1-C2alkylene, —O—, —S—, or —CO—, form fused ring;
• or R15 and R16, if appropriate together with C1-C2alkylene, —O—, —S—, or —CO—, form a 5-, 6-, or 7-membered ring;
• R19 is phenyl, which is unsubstituted or substituted by one or more C1-C12alkyl, halogen, —NO2, —CN, phenyl, C1-C4alkoxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, C1-C4alkylthio, phenylthio, C2-C12alkanoyl, C2-C12alkanoyloxy, benzoyl, benzoyloxy;
• or R19 is C1-C12alkyl, or C2-C12alkyl which is interrupted by one or more —O—, wherein the radicals C1-C12alkyl, and C2-C12alkyl are unsubstituted or substituted by one or more halogen, hydroxy, —NO2, —CN, phenyl, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, C1-C4alkylthio, phenylthio, C2-C12alkanoyl, C2-C12alkanoyloxy, benzoyl and/or benzoyloxy;
• R20, R21, and R22 independently of each other are phenyl, which is unsubstituted or substituted by one or more C1-C12alkyl, halogen, —NO2, —CN, phenyl, C1-C4alkoxy, hydroxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, C1-C4alkylthio, phenylthio, C2-C12alkanoyl, C2-C12alkanoyloxy, benzoyl and/or benzoyloxy;
• or R20, R21 and R22 independently of each other are C1-C12alkyl, C2-C12alkyl which is interrupted by one or more —O—, and wherein the radicals C1-C12alkyl and C2-C12alkyl are unsubstituted or substituted by one or more halogen, hydroxy, —NO2, —CN, phonyl, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, C1-C4alkylthio, phenylthio, C2-C12alkanoyl, C2-C12alkanoyloxy, benzoyl and/or benzoyloxy;
• or R20 and R21, if appropriate together with C1-C2alkylene, —O—, —S—, or —CO—, form a fused ring;
• or R20 and R21, if appropriate together with C1-C2alkylene, —O—, —S—, or —CO—, form a 5-, 6-, or 7-membered ring;
• and
• R23 and R24 independently of each other are phenyl, which is unsubstituted or substituted by one or more of C1-C12alkyl, halogen, —NO2, —CN, phenyl, C1-C4alkoxy, hydroxy, C2-C12alkoxycarbonyl, phenoxy, phenoxycarbonyl, C1-C4alkylthio, phenylthio, C2-C12-alkanoyl, C2-C12alkanoyloxy, benzoyl and/or benzoyloxy;
• or R23 and R24, if appropriate together with C1-C2alkylene, —O—, —S—, or —CO—, form fused ring.