An automatic intelligent yield improving and process parameter multivariate system and the anaysis method thereof

An automatic intelligent yield improving and process parameter multivariate analysis system applied to a computer to set up a plurality of analysis procedures for analyzing parameter data obtained from a plurality of measuring machines used for measuring a plurality of wafers in semiconductor testing process, the computer comprising a database for storing the parameter data and wafer lot numbers of the wafers, the system comprising:

• a plurality of semiconductor processing nodes, the semiconductor processing nodes comprising:
• a lot query node for searching for the wafer lot numbers conforming to a lot number searching condition from the database by inputting the lot number searching condition into the lot query node;
• a lot split node for dividing a group comprising at least one wafer lot number into a plurality of sub groups according to a lot split condition input into the lot split node;
• a lot merge node for merging a plurality of wafer lot numbers to form a group according to a merge condition input into the lot merge node;
• a data query node for searching for the parameter data corresponding to a data query condition from the database by inputting the data query condition into the data query node;
• and
• a statistical node for receiving the parameter data and providing at least one statistical calculation method to analyze the parameter data;
• a logic connection means for connecting two semiconductor processing nodes to produce a sequence between the semiconductor processing nodes to allow the computer to execute the commands of the semiconductor processing nodes sequentially;
• and
• a data connection means for producing a data connection between two of the semiconductor processing nodes to allow one of the semiconductor processing nodes to load the parameter data or wafer lot numbers from another semiconductor processing node.