Laminated thin-film device, manufacturing method thereof, and circuit
AssigneeFujitsu Limited
InventorsJohn David Baniecki, Takeshi Shioga, Kazuaki Kurihara
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Abstract
The present invention provides a novel capacitor element, laminated thin-film device, and circuit wherein the capacitance dependency on voltage can be appropriately adjusted, and a technology for manufacturing such a capacitor element and laminated thin-film device. In the capacitor element that comprises a pair of electrode layers and a dielectric layer disposed between the electrode layers, a well region where an ion is implanted is disposed in the dielectric layer, and the C-V curve between the electrode layers is shifted or shifted and expanded in at least one direction of the plus direction and minus direction with respect to the voltage axis.
Claims28
A laminated thin-film device having a capacitor element, comprising:
- a pair of electrode layers;
- a dielectric layer disposed between said electrode layers;
- and
- a well region with an implanted ion that is disposed in said dielectric layer for shifting or shifting and expanding a capacitance-voltage curve between said electrode layers in at least one direction of the plus direction and minus direction with respect to the voltage axis.
A manufacturing method for a laminated thin-film device comprising a capacitor element having a pair of electrode layers and a dielectric layer disposed between said electrode layers, comprising:
- performing masking of said dielectric layer;
- implanting an ion into said dielectric layer;
- removing said masking;
- repeating said performing masking, implanting, and removing said masking when necessary;
- and
- annealing.
A circuit, wherein capacitor elements are connected in parallel or in series or in a combination of parallel and series, and each of the capacitor elements comprises:
- a pair of electrode layers;
- a dielectric layer disposed between said electrode layers;
- and
- a well region disposed in said dielectric layer for shifting or shifting and expanding the capacitance-voltage curve between said electrode layers in at least one direction of the plus direction and minus direction with respect to the voltage axis.
Dependencies are inferred from the claim text.