Electronic design for integrated circuits based process related variations
AssigneeCadence Design Systems, Inc.
InventorsDavid White, Taber H. Smith
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AssigneeCadence Design Systems, Inc.
InventorsDavid White, Taber H. Smith
Estimating the term…
An electronic design is generated for an integrated circuit that is to be fabricated in accordance with the electronic design by a process that will impart topographically induced feature dimension variations to the integrated circuit. The generating includes adjusting the electronic design based on predictions of topographical and topographical-related feature dimension variations by a pattern-dependent model. An RC extraction tool is used in conjunction with the generating and adjusting of the electronic design. The process includes a fabrication process that will impart topographical variation to the integrated circuit and a lithography or etch process. Placement attributes for elements of the integrated circuit are determined.
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