Method for forming finely-structured parts, finely-structured parts formed thereby, and product using such finely-structured part

A micro-lens array having a plurality of recesses, which is formed by a formation method comprising:

• preparing a workpiece containing an etching control component;
• applying a mask having an array of opening, to said workpiece;
• etching said workpiece with an etching solution to thereby form an array of recesses, corresponding to the array of openings, in a surface of said workpiece, with the etching of said workpiece being stopped due to the etching control component eluted out of said workpiece in the etching solution within each recess;
• and
• applying a transparent material having an high refractive index to said workpiece such that the array of recesses are filled with the transparent material.

A matrix for molding a micro-lens array having a plurality of recesses, which is formed by a formation method comprising;

• preparing a workpiece containing an etching control component;
• applying a mask, having an array of opening, to said workpiece;
• and
• etching said workpiece with an etching solution to thereby form an array of recesses, corresponding to the array of openings, in a surface of said workpiece, with the etching of said workpiece being stopped due to the etching control component eluted out of said workpiece in the etching solution within each recess.

A liquid crystal display comprising:

• a first substrate including a micro-lens array and a first array of pixel areas defined on said micro-lens array;
• a second substrate having a second array of pixel areas corresponding to said first array of pixel areas;
• and
• a liquid crystal layer intervened between said first and second substrates which are combined such that said first and second arrays of pixel areas are registered with each other,
• wherein said micro-lens array is formed by a formation method comprising:
• preparing a workpiece containing an etching control component;
• applying a mask having an array of opening, to said workpiece;
• etching said workpiece with an etching solution to thereby form an array of recesses, corresponding to the array of openings, in a surface of said workpiece, with the etching of said workpiece being stopped due to the etching control component eluted out of said workpiece in the etching solution within each recess;
• and
• applying a transparent material having an high refractive index to said workpiece such that the array of recesses are filled with the transparent material.

A liquid crystal display apparatus comprising:

• a liquid crystal display having a micro-lens array assembled therein;
• a polarizing filter applied to said micro-lens array;
• a back light unit associated with said micro-lens array through the intermediary of said polarizing filter;
• and
• a controller unit that operates said liquid crystal display and said back light unit,
• wherein said micro-lens array is formed by a formation method comprising:
• preparing a workpiece containing an etching control component;
• applying a mask having an array of opening, to said workpiece;
• etching said workpiece with an etching solution to thereby form an array of recesses, corresponding to the array of openings, in a surface of said workpiece, with the etching of said workpiece being stopped due to the etching control component eluted out of said workpiece in the etching solution within each recess;
• and
• applying a transparent material having an high refractive index to said workpiece such that the array of recesses are filled with the transparent material.

A liquid crystal projector comprising:

• a light source that emits a light;
• an optical light valve system that modulates the light in accordance with image-pixel data, said optical light valve system including a liquid crystal display constituted as an optical valve device having a micro-lens array;
• and
• an optical projecting system that projects the modulated light to display an image based on said image-pixel data,
• wherein said micro-lens array is formed by a formation method comprising;
• preparing a workpiece containing an etching control component;
• applying a mask having an array of opening, to said workpiece;
• etching said workpiece with an etching solution to thereby form an array of recesses, corresponding to the array of openings, in a surface of said workpiece, with the etching of said workpiece being stopped due to the etching control component eluted out of said workpiece in the etching solution within each recess;
• and
• applying a transparent material having an high refractive index to said workpiece such that the array of recesses are filled with the transparent material.