Preventative maintenance aided tool for cvd chamber

A preventative maintenance aided tool for connection to a vacuum line and preventing escape of gases from a chamber, said tool comprising:

• a tool body for engaging the chamber, said tool body comprising a substantially cylindrical sidewall defining a body interior and a bottom opening;
• a lid panel carried by said sidewall opposite said bottom opening;
• at least one generally semicircular panel opening provided in said lid panel;
• at least one generally semicircular closing panel for removably sealing said at least one panel opening, respectively;
• and
• a vacuum line connector carried by said tool body for connection to the vacuum line.

A method of preventing leakage of gases from a chamber while cleaning the chamber, said method comprising the steps of:

• providing a preventative maintenance aided tool comprising a tool body for engaging the chamber, said tool body comprising a body interior and a bottom opening, at least one panel opening provided in said tool body, at least one closing panel for removably sealing said at least one panel opening, respectively, and a vacuum line connector carried by said tool body;
• providing said bottom opening of said tool body in fluid communication with said chamber;
• connecting said vacuum line connector to a vacuum line;
• and
• inducing a vacuum pressure in said chamber, whereby said chamber can be cleaned through said at least one panel opening without leakage of the gases from said chamber.