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US 2003/0228467 A1Published application
Targeted deposition of nanotubes
AssigneeInfineon Technologies AG
InventorsMaik Liebau, Eugen Unger, Georg Dusberg
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Abstract
The present invention relates to a method for the targeted deposition of nanotubes, in particular carbon nanotubes, on planar surfaces by exploiting capillary forces using microfluid capillary systems.
Claims14
A method for the targeted deposition of nanotubes on planar surfaces, comprising the steps of:
- (a) providing a ram made from elastomeric material having a relief structure on one of the ram surfaces,
- (b) applying the ram to a planar substrate, in such a manner that substrate and ram, in combination, form a microfluid capillary system which is composed of one or more capillaries and has at least one inlet and outlet,
- (c) bringing a dispersion of nanotubes into contact with at least one inlet of the microfluid capillary system, so that, using capillary force, the dispersion of nanotubes spreads out through the microfluid capillary system, filling the one or more capillaries,
- (d) drying the dispersion of nanotubes, and
- (e) removing the ram.
2 more elements
An electronic component, comprising a substrate which, on at least one surface thereof, has regularly arranged, discrete structures of nanotubes in a width in the range from 0.05 μm to 10.0 μm and a length in the range from 0.1 μm to 1.5 cm.
Dependencies are inferred from the claim text.