US 2003/0228049 A1 · Apparatus and method for inspecting pattern

Abstract

An inspection apparatus (1) comprises an image pickup part (2) for performing an image pickup of a substrate (9), an operation part (4) to which an image signal is inputted from said image pickup part (2) and a computer (5), and the operation part (4) specifies an inspection image and a reference image from an object image acquired by the image pickup part (2). In the operation part (4), a class teaching part (501) generates a teaching image from the inspection image and an image sampling part (502) samples a plurality of pixels from the teaching image while a feature value calculation part (43) calculates pixel feature values from values of corresponding pixels in the inspection image and the reference image. A dataset generation part (503) generates a dataset of pixel feature values and a class on each of the sampled pixels. A classifier construction part (504) performs training with the dataset to generate a defect check condition and the defect check condition is inputted to an inspection result generation part (44). With this operation, the inspection apparatus (1) can efficiently and appropriately detect defects.

Claims28

Dependent claims

An apparatus for inspecting pattern on an object, comprising:

an image pickup device for performing an image pickup of an object to acquire data of multitone inspection image;
a memory for storing data of reference image and classification data obtained by adding a class to each pixel of said inspection image;
a feature value calculation part for calculating a feature value on the basis of a value of each of a plurality of pixels selected from said inspection image and a value of corresponding pixel in said reference image;
a dataset generation part for generating a dataset indicating a combination of a feature value and a class on each of said plurality of pixels;
and
a classifier construction part for constructing a classifier by training with said dataset to output a classification result in accordance with an inputted feature value.

3 more elements

A method of inspecting pattern on an object, comprising the steps of:

a) preparing data of a multitone inspection image acquired from an object;
b) preparing data of a reference image;
c) preparing classification data obtained by adding a class to each pixel of said inspection image;
d) selecting a plurality of pixels in said inspection image;
e) obtaining a feature value on the basis of a value of each of said plurality of pixels and a value of corresponding pixel in said reference image;
f) generating a dataset indicating a combination of a feature value and a class on each of said plurality of pixels;
g) constructing a classifier by training with said dataset to output a classification result in accordance with an inputted feature value;
h) preparing another data of an inspection image and a reference image;
i) selecting one pixel in said inspection image;
j) obtaining a feature value on the basis of a value of said one pixel and a value of corresponding pixel in said reference image;
and
k) acquiring a classification result by inputting said feature value to said classifier.

9 more elements

Dependencies are inferred from the claim text.

Apparatus and method for inspecting pattern

Life of this patent

Apparatus and method for inspecting pattern

Life of this patent

Abstract

Claims28