Computer-implemented reflectance system and method for non-destructive low dose ion implantation monitoring

A system for non-destructive monitoring low dose ion implantation in a material, comprising:

• a light source means for providing illumination on a first sample of said material wherein said illumination spans a substantially broad range of wavelengths (wl);
• an optical sensing means optically coupled to said light source means for obtaining non-implanted reflectance measurements (Rref) and implanted reflectance measurements (Rimp) of said sample at each of said wavelengths, (Rref,wl) and (Rimp,wl), respectively, and transmitting reflectance measurements obtained thereof;
• and
• a computing means operatively coupled to said optical sensing means for analyzing said transmitted reflectance measurements, comprising:
• means for forming respective reflectance values over said wavelengths based on said non-implanted reflectance measurements and implanted reflectance measurements;
• means for comparing said non-implanted and implanted reflectance values and determining reflectance changes;
• means for determining a reflectance change index value, said reflectance change index correlating an absolute value of said reflectance changes to said low dose;
• and
• means for providing said reflectance change index value to a user and receiving user input.

A computer program product embodied in a reflectance system for implementing a method for non-destructive monitoring low dose ion implantation in a first wafer, the reflectance system comprises a light source means for providing visible and invisible light on said wafer at a substantially broad range of wavelengths (wl) and an optical sensing means for obtaining non-implanted and implanted reflectance measurements of said wafer at each of said wavelengths, (Rref,wl) and (Rimp,wl), respectively, the computer program product comprising:

• a computer-readable medium carrying computer-executable instructions for implementing the method wherein the computer-executable instructions comprise:
• program code means for forming respective reflectance values over said wavelengths based on said non-implanted reflectance measurements and implanted reflectance measurements;
• program code means for comparing said non-implanted and implanted reflectance values and determining reflectance changes;
• program code means for determining a reflectance change index value, said reflectance change index correlating an absolute value of said reflectance changes to said low dose;
• and
• program code means for providing a graphic user interface environment to display said reflectance change index value and receive user input.