Fluorochemical treatment for silicon articles
Assignee3M Innovative Properties Company
InventorsTimothy D. Dunbar, Lawrence A. Zazzera, Mark J. Pellerite, Larry D. Boardman, George G. Moore, Miguel A. Guerra, Cheryl L. Elsbernd
Life of this patent
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Abstract
Silicon substrates having Si—H bonds are chemically modified using a fluorinated olefin having the formula: 1 wherein m is an integer greater than or equal to 1; n is an integer greater than or equal to 0; Z is a divalent linking group; and Rf is a highly fluorinated organic group.
Claims59
A method for modifying a silicon substrate comprising:
- providing a silicon substrate having a plurality of Si-H bonds;
- providing a composition comprising:
- a fluorinated olefin having the formula:
- 8
- wherein
- m is an integer greater than or equal to 1,
- n is an integer greater than or equal to 0,
- Z is a divalent linking group,
- Rf is a highly fluorinated organic group, and
- optional solvent;
- and
- contacting the composition with the silicon substrate under conditions such that the fluorinated olefin becomes covalently attached to the surface of the silicon substrate.
An article comprising a chemically modified silicon substrate prepared according to a method comprising:
- providing a silicon substrate;
- etching the silicon substrate to form a plurality of Si-H bonds;
- providing a composition comprising:
- a fluorinated olefin having the formula:
- 12
- wherein
- m is an integer greater than or equal to 1,
- n is an integer greater than or equal to 0,
- Z is a divalent linking group,
- Rf is a highly fluorinated organic group, and
- optional solvent;
- and
- contacting the composition with the silicon substrate under conditions such that the fluorinated olefin becomes covalently attached to the silicon substrate.
An article comprising a chemically modified silicon substrate, wherein the chemically modified substrate comprises at least one silicon atom that is covalently bonded to an organic group having the formula:
- Sisub—CH2CH2CmH2m—Z—CnH2n—Rf
- wherein
- m is an integer greater than or equal to 1;
- n is an integer greater than or equal to 0;
- Z is a divalent linking group;
- Rf is a highly fluorinated organic group;
- and
- Sisub is a substrate silicon atom directly bonded to at least one additional substrate silicon atom.
Dependencies are inferred from the claim text.