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AssigneeMicronit Microfluidics B.V.
InventorsStefan Schlautmann, Albert Van den Berg, Johannes Gerardus Elisabeth Gardeniers
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The present invention relates to a method of fabricating a microfluidic device including at least two substrates provided with a fluid channel, comprising the steps of: a) etching at least a channel and one or more fluid ports in a first and/or a second substrate; b) depositing a first layer on a surface of the second substrate; c) partially removing the first layer in accordance with a predefined geometry; d) depositing a second layer on top of the first layer and the substrate surface; e) planarizing the second layer so as to smooth the upper surface thereof; f) aligning the first and second substrate; g) bonding the first substrate on the planarized second layer of the second substrate.
Method of fabricating a microfluidic device including at least two substrates provided with a fluid channel, comprising the steps of:
Method according to any of the preceding claims, wherein step c of partially removing the conductive layer comprises patterning of the predefined electrode geometry in the conductive layer.
Method according to any of the preceding claims, wherein step d of depositing the insulating layer comprises applying a chemical vapour deposition process.
Method according to any of the preceding claims, comprising depositing an insulating layer of a thickness equal to or, preferably, larger than the step height present on the substrate.
Method according to any of the preceding claims, wherein step e of planarizing the insulating layer comprises applying a chemical mechanical polishing (CMP) process on the insulating layer.
Method according to any of the preceding claims, wherein the substrates are pressure assisted and/or low temperature bonded.
Method according to any of the preceding claims, comprising the steps of filling the channel and/or the ports with filler material, planarizing the insulating layer and removing the filler material.
Method according to any of the preceding claims, comprising fabricating a plurality of microfluidic devices on said substrates and separating the substrates into the individual microfluidic devices.
Method according to any of the preceding claims, comprising the step of depositing a heating layer for heating the fluid in the channel.
Microfluidic device as fabricated according to the method of any of the preceding claims, wherein the first layer is arranged relative to the channel so as to influence the transport or the properties of the fluid in the channel.
Dependencies are inferred from the claim text.