Double acting cold trap
AssigneeChartered Semiconductor Manufacturing Ltd.
InventorsWei Hua Tong, Chen Yu Yang, Zhang Jian, Qian Wu Quan
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Abstract
A double acting cold trap equipped with a set of exhaust gas condensing fins and a set of exhaust gas condensing plates is disclosed. The invention also discloses a double acting cold trap that incorporates a deflecting plate to direct the exhaust gases over the condensing fins and plates in a serial fashion. This increases the efficiency of the collection of unwanted particles.
Claims16
A double acting cold trap for collecting unwanted byproducts, reactants and particles in the exhaust gases of a low pressure chemical vapor deposition system comprising:
- A cylindrical stainless steel housing;
- A gas inlet port on the side of the cylindrical steel housing;
- A gas outlet port on the bottom of the cylinder;
- and
- A gas condensing apparatus with cooling liquid inlet and outlet fittings, condensing fins parallel, and plates perpendicular to the gas flow.
A double acting cold trap with condensing fins and plates so arranged as to maximize the condensing surface area presented to the exhaust gases.
A method of collecting unwanted by-products, reactants and particles in exhaust gases of a low pressure CVD system comprising the steps of:
- Providing a cylindrical steel housing;
- Providing a gas inlet port on a side of the cylindrical steel housing;
- Providing a gas outlet port on the bottom of the cylindrical steel housing;
- Providing a gas condensing apparatus with cooling liquid inlet and outlet fittings, condensing fins parallel, and plates perpendicular to the gas flow.
- And flowing said exhaust gases over said fins and plates.
Dependencies are inferred from the claim text.