Photomask with dies relating to different functionalities

A method comprising:

• arranging a plurality of dies for manufacture of a photomask, at least one die having a different functionality than a functionality of other of the plurality of dies, the different functionality of the at least one die having a definition grade at least substantially close to a definition grade of the other of the plurality of dies;
• and,
• manufacturing the photomask having the plurality of dies as have been arranged.

A semiconductor device fabricated at least in part by using a photomask comprising:

• at least one first semiconductor die, each first semiconductor die relating to first functionality having a first definition grade;
• at least one second semiconductor die, each second semiconductor die relating to second functionality different than the first functionality and having a second definition grade at least substantially close to the first definition grade.