Variable capacitance element

A variable capacitance element comprising:

• a substrate;
• a high frequency signal conducting portion on the substrate;
• a movable body located above and spaced apart from the substrate and facing toward at least a portion of the high frequency signal conducting portion;
• a movable electrode provided on the movable body and facing toward the high frequency signal conducting portion;
• a fixed side electrode for movable body displacement provided on the substrate in an area facing toward the movable body and spaced apart from the high frequency signal conducting portion, the movable body including an insulating semiconductor or an insulator against high frequency signals;
• and
• a movable side electrode for movable body displacement provided on a substrate facing surface of the movable body, facing toward the fixed side electrode for movable body displacement on the substrate, and spaced apart from the movable electrode;
• wherein
• the movable side electrode for movable body displacement is provided on an upper member surface facing toward the movable body;
• the fixed side electrode is provided on the upper member by facing toward the movable side electrode for movable body displacement;
• wherein
• the movable side electrode for movable body displacement and the fixed side electrode for movable body displacement are included in a variable capacitance device, which displaces the movable body toward the upper member by using electrostatic gravity caused by applying direct current voltage between the movable side electrode for movable body displacement and the fixed side electrode for movable body displacement so as to vary electrostatic capacitance between the movable electrode in the movable body and the high frequency signal conducting portion on the substrate.

A variable capacitance element, comprising:

• a substrate;
• a high frequency signal conducting portion provided on the substrate for conducting signals from the outside;
• a movable electrode movably provided on the substrate for switching conduction states for signals conducting to the high frequency signal conducting portion by displacing toward or away from the high frequency signal conducting portion;
• a first driving electrode provided on the substrate and facing toward the movable electrode for displacing the movable electrode to a first switching position near the high frequency signal conducting portion by the conduction of high frequency signals;
• and
• a second driving electrode provided on the opposite side of the first driving electrode through the movable electrode for displacing the movable electrode to a second switching position away from the high frequency signal conducting portion by the conduction of high frequency signals.

A variable capacitance element, comprising:

• a substrate;
• a high frequency signal conducting portion provided on the substrate;
• a movable electrode movably provided on the substrate for changing electrostatic capacitance between the movable electrode and the high frequency signal conducting portion by displacing toward or away from the high frequency signal conducting portion;
• a first driving electrode provided on the substrate and facing toward the movable electrode for displacing the movable electrode toward the high frequency signal conducting portion;
• and
• a second driving electrode provided on the opposite side of the first driving electrode through the movable electrode for displacing the movable electrode away from the high frequency signal conducting portion.