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US 2003/0222948 A1Published application
Piezoelectronic actuator and liquid jetting head
AssigneeSeiko Epson Corporation
InventorsTakamitsu Higuchi, Setsuya Iwashita, Koji Sumi, Masami Murai
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Abstract
The present invention provides an optimum layer structure for a piezoelectric actuator in which (100) orientation strontium ruthenate is used as a bottom electrode. The piezoelectric actuator comprises a Si substrate 20, a diaphragm 30 comprising (110) or (100) orientation strontium oxide which is formed thereon by means of epitaxial growth, a bottom electrode 42 comprising (100) orientation strontium ruthenate having a perovskite structure, a piezoelectric layer 43 comprising (100) orientation PZT, and a top electrode 44.
Claims6
A piezoelectric actuator comprising:
- a diaphragm comprising (110) or (100) orientation strontium oxide that is epitaxially formed on a Si substrate;
- a bottom electrode comprising (100) orientation strontium ruthenate having a perovskite structure that is formed on said diaphragm;
- a piezoelectric layer comprising (100) orientation PZT that is formed on said bottom electrode;
- and
- a top electrode formed on said piezoelectric layer.
2 more elements
Dependencies are inferred from the claim text.