Ink-jet recording head, manufacturing method of the same, and ink-jet recording apparatus

A method of manufacturing for the ink-jet recording head including a passage-forming substrate on which pressure generating chambers communicating with nozzle orifices are defined, and a piezoelectric element composed of a lower electrode, a piezoelectric layer, and an upper electrode being severally made of thin films to be formed on one side of the passage-forming substrate by film-forming and lithography methods while interposing a vibrating plate therebetween, the method comprising the steps of;

• forming the vibrating plate and the lower electrode on the passage-forming substrate;
• forming an etching adjustment layer having etching selectivity with the piezoelectric layer and the lower electrode at least in a region on the lower electrode other than a region where the piezoelectric element is formed;
• sequentially laminating the piezoelectric layer and the upper electrode and patterning these piezoelectric layer and the upper electrode by etching until reaching at least the etching adjustment layer so as to form the piezoelectric element;
• and
• removing the etching adjustment layer in a region other than the piezoelectric layer.