Compact, large angle beam stabilization module
OwnerPhillip V. Mitchellinventor
Life of this patent
Estimating the term…
Abstract
A laser beam stabilization module that has a tilt compensation device and a separate displacement compensation device. Each compensation device is coupled to a feedback loop to correct for tilt and displacement errors in a laser beam stabilized by the module. Providing a pure displacement compensation device eliminates the additional tilt error found in two mirror stabilization modules of the prior art.
Claims29
A stabilization module that can stabilize a light beam that travels along an optical path, comprising:
- a tilt compensation device located in the optical path;
- a tilt feedback assembly coupled to said tilt compensation device;
- a displacement compensation device located in the optical path;
- and,
- a displacement feedback assembly coupled to said displacement compensation device.
A stabilization module that can stabilize a light beam that travels along an optical path, comprising:
- tilt detection means for detecting a tilt error of the light beam;
- tilt means for varying an angle of the light beam in accordance with the tile error;
- displacement detection means for detecting a displacement error of the light beam;
- and,
- displacement means for varying a displacement of the light beam in accordance with the displacement error.
A method for stabilizing a light beam that travels along an optical path, comprising:
- determining a tilt error in the light beam;
- varying an angle of the light beam in response to the tilt error with a tilt compensation device;
- determining a displacement error in the light beam;
- and,
- varying a displacement of the light beam in response to the displacement error with a displacement compensation device.
A stabilization module that can stabilize a light beam that travels along an optical path to a workpiece, comprising:
- a tilt compensation device located in the optical path;
- a tilt feedback assembly coupled to said tilt compensation device;
- and,
- a lens that focuses the light beam onto a point of the workpiece.
A stabilization module that can stabilize a light beam that travels along an optical path onto a workpiece, comprising:
- tilt detection means for detecting a tilt error of the light beam;
- tilt means for varying an angle of the light beam in accordance with the tilt error;
- and,
- lens means for focusing the light beam onto a point of the workpiece.
A method for stabilizing a light beam that travels along an optical path onto a workpiece, comprising:
- focusing the light beam onto a point of the workpiece;
- determining a tilt error in the light beam;
- and,
- varying an angle of the light beam in response to the tilt error with a tilt compensation device.
Dependencies are inferred from the claim text.