Method of forming an active matrix organic light emitting display

A method of forming an active matrix organic light emitting display, comprising steps of:

• providing a transparent insulating substrate;
• forming a first metal layer on the transparent insulating substrate and then using a first photolithography-etching process to pattern the first metal layer as a first scanning line extending along an X direction, a bottom electrode of a capacitor and a second scanning line extending along the X direction;
• successively forming a gate-insulating layer, an amorphous silicon layer and a doped amorphous silicon layer on the entire surface of the transparent insulating substrate;
• using a second photolithography-etching process to pattern the amorphous silicon layer and the doped amorphous silicon layer as a first island structure and a second island structure respectively within two predetermined TFT areas over the first scanning line and the second scanning line, in which the amorphous silicon layer and the doped amorphous silicon layer disposed outside the two predetermined TFT areas are removed;
• using a third photolithography-etching process to form a via in the gate-insulating layer to expose a part of the second scanning line that is outside the predetermined TFT area;
• forming a transparent conductive layer on the entire surface of the transparent insulating substrate, and then using a fourth photolithography-etching process to pattern the transparent conductive layer as a pixel electrode;
• forming a second metal layer on the entire surface of the transparent insulating substrate, and then using a fifth photolithography-etching process to pattern the second metal layer as a data line extending along a Y direction and a top electrode of the capacitor, in which a first opening and a second opening are respectively formed in the first island structure and the second island structure until exposing the amorphous silicon layer to separate the second metal layer as a source/drain electrode and the doped amorphous silicon layer as a source/drain diffusion region;
• and
• forming a protective layer on the entire surface of the transparent insulating substrate, and then using a sixth photolithography-etching process to remove the protective layer from the pixel electrode.