Scanning angle expander and a method for expanding a scanning beam angle
AssigneeApplied Materials Israel Ltd.
InventorHaim Feldman
Life of this patent
Estimating the term…
Abstract
A scanning angle expander that includes a converting optics for receiving an input beam, the input beam being inclined with respect with an optical axis of the converting optics by an input scan angle, and for converting the input beam to multiple output beamlets, each output beamlet being inclined with respect to the optical axis of the converting optics by an output scan angle; and expanding optics, for converting the multiple output beamlets to an output beam that is substantially parallel to the output beamlets, whereas the output beam and the input beam have substantially a same size.
Claims38
A scanning angle expander, comprising:
- converting optics for receiving an input beam, the input beam being inclined with respect with an optical axis of the converting optics by an input scan angle, and for converting the input beam to multiple output beamlets, each output beamlet being inclined with respect to the optical axis of the converting optics by an output scan angle;
- and
- expanding optics, for converting the multiple output beamlets to an output beam that is substantially parallel to the output beamlets, whereas the output beam and the input beam have substantially a same size.
A method for scanning angle expansion, the method comprising the steps of:
- (a) receiving an input beam by a converting optics, the input beam being inclined with respect with an optical axis of the a converting optics by an input scan angle;
- (b) converting the input beam to multiple output beamlets, each output beamlet being inclined with respect to the optical axis of the converting optics by an output scan angle;
- and
- (c) converting the multiple output beamlets to an output beam that is substantially parallel to the output beamlets, whereas the output beam and the input beam have substantially a same size.
Dependencies are inferred from the claim text.