US 2003/0211758 A1Published application

Alignment mark shielding ring without arcing defect and method for using

AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.

InventorChen-Fang Chung

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Abstract

An alignment mark shielding ring for use in a physical vapor deposition chamber and a method for using the ring to avoid arcing problems on the wafer. The alignment mark shielding ring can be constructed of a ring that has a generally L-shaped cross-section, at least one hood portion to function as the shield for the alignment mark, at least one alignment pin for engaging at least one alignment sleeve mounted in a lower chamber shield for holding the alignment mark shielding ring in place. The alignment sleeve is constructed in two halves, each having an aperture therethrough. The aperture in the top half is larger than the aperture in the bottom half such that even when the apertures are coated with a metal layer deposited in the PVD process, the alignment pin does not electrically short to the lower chamber shield and thus, any possibility of arcing is avoided.

Claims20

Dependent claims

An alignment mark shielding ring for use in a process chamber comprising:

a ring having a generally L-shaped cross-section with a first section of the L parallel to a plane of the ring and a second section of the L perpendicular to the plane of the ring;
at least one hood portion extending from said first section of the L of said ring for shielding at least one alignment mark situated on a wafer;
at least one alignment pin extending from said second section of the L of said ring in a downward direction;
and
at least one alignment sleeve situated in a lower chamber shield of said process chamber for engaging said at least one alignment pin, each of said at least one alignment sleeve being formed of an electrically insulating material and by an upper sleeve and a lower sleeve stacked together and making point contact through at least three protrusions situated on a contact surface of one of said upper and lower sleeves, each of said upper and lower sleeves having an aperture therethrough for engaging said at least one alignment pin, a first diameter of said aperture in said upper sleeve being at least 1 mm larger than a second diameter of said aperture in said lower sleeve such that even when said apertures are coated with an electrically conductive coating, the at least one alignment pin is not shorted to the lower chamber shield of the process chamber.

2 more elements

A pedestal system equipped with an arc-proof alignment mark shielding ring for use in a process chamber comprising:

a pedestal having a diameter larger than a diameter of a wafer it carries on a top surface, said pedestal being operable in an up-and-down motion by an elevating means;
and
an alignment mark shielding ring for engaging said top surface of the pedestal with said wafer therein-between, said alignment mark shield ring having at least one alignment pin extending downwardly penetrating at least one alignment sleeve mounted in a lower chamber shield of said process chamber, said at least one alignment sleeve being formed of an electrically insulating material and by an upper sleeve and a lower sleeve stacked together and making point contact through at least three protrusions situated on a contact surface of one of said upper and lower sleeves, each of said upper and lower sleeves having an aperture therethrough for engaging said at least one alignment pin, a first diameter of said aperture in said upper sleeve being at least 1 mm larger than a second diameter of said aperture in said lower sleeve such that even when said apertures are coated with an electrically conductive coating, the at least one alignment pin is not shorted to the lower chamber shield of the process chamber.

A method for shielding an alignment mark on a wafer in a process chamber comprising the steps of:

providing a pedestal having a diameter larger than a diameter of a wafer it carries on a top surface, said pedestal being operable in an up-and-down motion by an elevating means;
providing an alignment mark shielding ring for engaging said top surface of the pedestal with said wafer therein-between, said alignment mark shielding ring being equipped with at least one alignment pin extending downwardly;
providing at least one alignment sleeve mounted in a lower chamber shield of said process chamber, said at least one alignment sleeve being formed of an electrically insulating material and by an upper sleeve and a lower sleeve stacked together and making point contact through at least three protrusions situated on a contact surface of one of said upper and lower sleeves, each of said upper and lower sleeves having an aperture therethrough for engaging said at least one alignment pin, a first diameter of said aperture in said upper sleeve being at least 1 mm larger than a second diameter of said aperture in said lower sleeve such that even when said apertures are coated with an electrically conductive coating, said at least one alignment pin is not shorted to said lower chamber shield of the process chamber;
mounting said alignment mark shielding ring on top of said pedestal such that said at least one alignment pin penetrates said at least one alignment sleeve;
and
conducting a fabrication process in said process chamber.

3 more elements

Dependencies are inferred from the claim text.