Method and system for maintenance of semiconductor manufacturing

A semiconductor manufacturing system including:

• an automatic process control system which registers plural different process flows for manufacturing different kinds of semiconductor device respectively on a semiconductor production line;
• a production control system which manages production processes based on a state of processing lots and a past-history on said semiconductor manufacturing line;
• and
• a maintenance system for maintaining said plural different process flows registered in said automatic process control system,
• wherein said maintenance system includes a first function unit for setting an automatic process control in said automatic process control system based on an automatic process control information for each of said plural different process, and
• wherein said automatic control information for each of said plural different process flows further includes a process flow name, and process names respectively unique to the single process flow.