Latch sensor for pod transport gripper

A system comprising:

• a pod having a plurality of latch holes and two side surfaces and receptive to semiconductor wafers;
• a transport gripper for vertically transferring the pod via two clamps clamping to the two side surfaces of the pod and a plurality of latches rotatably engaging the plurality of latch holes;
• and,
• at least one latch sensor disposed on the transport gripper to determine whether the plurality of latches have properly engaged the plurality of latch holes of the pod.

A method comprising:

• descending a transport gripper over a pod receptive to semiconductor wafers;
• gripping the pod by the transport gripper;
• engaging latches of the transport gripper to corresponding latch holes of the pod;
• determining whether the latches of the transport gripper have properly engaged the corresponding latch holes of the pod with at least one latch sensor;
• in response to determining that the latches of the transport gripper have properly engaged the corresponding latch holes of the pod, rotating the latches of the transport gripper within the corresponding latch holes of the pod;
• and,
• ascending the transport gripper with the pod gripped thereto.