Processing method and processing apparatus

A processing method for successively processing a plurality of workpieces in different process conditions, the processing method comprising the steps of:

• providing a first process portion to be set for a process condition for a workpiece to be processed first;
• providing a second process portion to be set for a process condition for a workpiece to be processed next, the second process portion being composed of at least one unit;
• allowing the first process portion and the second process portion to be changed to their process conditions;
• while the workpiece to be processed first is being transferred to the first process portion and the workpiece is being processed therein, setting the second process portion for the process condition for the workpiece to be processed next and placing the second process portion in a ready state for processing the workpiece;
• after the first process portion has processed the workpiece, transferring the workpiece to be processed next to the second process portion and causing the second process portion to process the workpiece;
• while the second process portion is processing the workpiece, changing the first process portion to the same process condition as that of the second process portion, transferring the workpiece to be processed next to the first process portion whose process condition has been changed, and causing the first process portion to process the workpiece;
• after the second process portion has processed the workpiece, changing the second process portion to a process condition for a workpiece to be processed after the next and placing the second process portion in a ready state for processing the workpiece;
• and
• changing the first process portion and the second process condition to the process condition for the workpiece to be processed next and causing the first process portion and the second process portion to successively process the plurality of workpieces.

A processing apparatus, comprising:

• a first process portion for processing a plurality of workpieces in at least a first process condition and a second process condition that is different from the first process condition;
• a second process portion for processing the workpieces in at least the second process condition;
• and
• controlling means for changing the first process portion to the second process condition and causing the first process portion to process a third workpiece of the workpieces in the second process condition, after the first process portion has processed a first workpiece of the workpieces in the first process condition while the second process portion is processing a second workpiece of the workpieces.

A processing apparatus for successively processing a plurality of workpieces in different process conditions, the processing apparatus comprising:

• a loading and unloading portion for loading and unloading the workpieces;
• a process portion having a first process portion and a second process portion that can be set for different process conditions for the workpieces, the second process portion being composed of at least one unit;
• transferring means for transferring and transferring the workpieces between the loading and unloading portion and the process portion;
• and
• controlling means for setting the second process portion for a process condition for a workpiece to be processed next while the first process portion is processing a workpiece to be processed first, sending a command to the transferring means so as to transfer the workpiece that has been processed in the second process portion, and changing the first process portion to the process condition for the workpiece to be processed next.