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AssigneeJapan Super Quartz Corporation
InventorsMasanori Fukui, Masaru Satoh
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SUMMARY [Object]: The present invention provides a process and a device for producing a quartz glass crucible, which generates a stable ring-like arc and is suitable for the production of an excellent crucible having the large open diameter. [Means to be solved]: In a production process and a device for producing a quartz glass crucible, wherein a quartz powder in a mould is heated to be fused by an arc discharge of the electrodes being positioned at around of a rotational axis of a mould, this invention is characterized by using an electrode structure, in which electrodes neighboring each other are positioned at regular intervals in the ring configuration, to form the stable ring-like arc being generated between the electrodes neighboring each other without generating an continuous arc between electrodes facing each other across a central portion of the ring, and heating and fusing a quarts powder.
A production process of a quartz glass crucible, wherein a quartz powder in a mould is heated to be fused by an arc discharge of electrodes being positioned around a rotational axis of the mould to produce a quartz glass crucible,
A production device of the quartz glass crucible by a rotational mould method, the device comprising,
A quartz glass crucible for pulling up single crystal silicon, wherein a bubble content of a transparent layer at a bottom portion of the crucible being the layer thickness of less than 1 mm from the inside surface of the crucible is less than 0.03%, and the bubble content of a transparent layer at a side wall portion of the crucible is less than 3 times of that of a transparent layer at the bottom portion.
Dependencies are inferred from the claim text.