Bolometer-type infrared solid-state image sensor

Abstract

A bolometer-type infrared solid-state image sensor has a plurality of infrared detecting elements provided above the substrate, which has diaphragm spacing from the substrate and supported by beams. The diaphragm has a bolometer thin film, electrodes arranged on the both end of the bolometer thin film, an upper layer protective film and a lower layer protective film, which are formed so as to sandwich and cover said bolometer thin film and the electrodes, and concave or convex sections formed on said lower layer protective film. The bolometer thin film is formed on the sides of the concave or convex sections. The beams includes wiring material and insulating protective films surrounding the wiring material.

Dependencies are inferred from the claim text.