Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus

An inspection method using an electron beam of an apparatus that has a primary column, a secondary column and a chamber, the method comprising steps of:

• emitting charged particles from an electron gun located inside the primary column and accelerating the charged particles to form a primary beam;
• shaping a cross section of the primary beam into a desired shape by a primary optical system located inside the primary column;
• deflecting a trajectory of the primary beam using a primary deflector located inside the primary column;
• illuminating a sample using the primary beam, the sample being on a stage to which a retarding voltage is applied;
• accelerating at least one of secondary electrons, reflected electrons or backwardly scattered electrons that are emerging from the sample on the stage toward the second column to form a secondary beam;
• deflecting a trajectory of the secondary beam using a secondary deflector located inside the secondary column;
• and
• guiding the secondary beam to a detector located inside the secondary column.