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US 2003/0205285 A1Published application
Apparatus and method for minimizing the generation of particles in ultrapure liquids
AssigneeAdvanced Technology Materials, Inc.
InventorsWayne Kelly, Dennis Chilcote
Life of this patent
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Abstract
A system and method of reducing particle generation in packaging containers used to transport ultra pure liquids. Particle generation in the containers is reduced by reducing the air-liquid interface present during filling, transport, and dispensing of the liquid.
Claims45
A method of minimizing particle generation during handling of ultra pure liquids, the method comprising:
- introducing a liquid into a container;
- and
- controlling an air-liquid interface to minimize an amount of particles generated in the liquid.
A method of minimizing particle generation in ultra pure liquids during handling of the liquid, the method comprising:
- transferring a liquid having an initial particle concentration, from a first location to a second location;
- and
- controlling an air-liquid interface during transfer so that a final particle concentration of the liquid when the liquid is in the second location is not substantially greater than the initial particle concentration.
A system for handling ultra pure liquids, which reduces particle generation in the liquid, the system comprising:
- means for transferring a liquid having an initial particle concentration, from a first location to a second location;
- means for controlling an air-liquid interface during transfer of the liquid so that a final particle concentration of the liquid is not substantially greater than the initial particle concentration.
Dependencies are inferred from the claim text.