Semiconductor wafer manufacturing execution system with special engineer requirement database

A manufacturing execution system, comprising:

• a receiving module configured to receive operation data from a process tool, wherein the process tool is configured to perform a selected operation on at least one semiconductor wafer positioned within the process tool;
• a memory system, comprising:
• a first database storing a first plurality of records, wherein each of the first plurality of records comprises information indicative of a basic operation to be performed on the at least one semiconductor wafer;
• and
• a second database storing a second plurality of records, wherein each of the second plurality of records comprises information indicative of a special engineer requirement (SER) operation to be performed on the at least one semiconductor wafer;
• a comparing module configured to access the first and second databases, and to compare the operation data with each of the first and second pluralities of records;
• and
• an output module configured to provide an alarm signal to the process tool when the operation data does not match any one of the first and second pluralities of records.

A semiconductor wafer fabrication system, comprising:

• a process tool configured to perform a selected operation on at least one semiconductor wafer positioned within the process tool;
• a manufacturing execution system operably coupled to the process tool and comprising:
• a first database storing a first plurality of records, wherein each of the first plurality of records comprises information indicative of a routine operation to be performed on the least one semiconductor wafer;
• and
• a second database storing a second plurality of records, wherein each of the second plurality of records comprises information indicative of a special operation to be performed on the at least one semiconductor wafer.

A semiconductor wafer fabrication system, comprising:

• a process tool configured to perform a selected operation on at least one semiconductor wafer positioned within the process tool;
• a manufacturing execution system, comprising:
• a receiving module configured to receive operation data from the process tool, wherein the operation data is indicative of the selected operation;
• a memory system, comprising:
• a first database storing a first plurality of records, wherein each of the first plurality of records comprises information indicative of a basic operation to be performed on the at least one semiconductor wafer;
• and
• a second database storing a second plurality of records, wherein each of the second plurality of records comprises information indicative of a special engineer requirement (SER) operation to be performed on the at least one semiconductor wafer;
• a comparing module configured to access the first and second databases, and to compare the operation data with each of the first and second pluralities of records;
• and
• an output module configured to provide an alarm signal to the process tool when the operation data does not match any one of the first and second pluralities of records.

A method, comprising:

• receiving operation data from a process tool, wherein the operation data is indicative of a selected operation to be performed within the process tool;
• comparing the operation data with each of a first plurality of records and a second plurality of records, wherein each of the first plurality of records comprises information indicative of a special operation to be performed within the process tool, and wherein each of the second plurality of records comprises information indicative of a routine operation to be performed within the process tool;
• and
• providing an alarm signal to the process tool if the operation data does not match any one of the first and second pluralities of records.

A method, comprising:

• receiving operation data from a process tool, wherein the operation data is indicative of a selected operation to be performed within the process tool;
• comparing the operation data with each of a first plurality of records, wherein each of the first plurality of records comprises information indicative of a special operation to be performed within the process tool;
• if the operation data does not match any one of the first plurality of records, comparing the operation data with each of a second plurality of records, wherein each of the second plurality of records comprises information indicative of a routine operation to be performed within the process tool;
• and
• providing an alarm signal to the process tool if the operation data does not match any one of the second plurality of records.