Management system and apparatus, method therefor, and device manufacturing method

A management method of managing a parameter for an industrial device which operates in accordance with a parameter, comprising:

• an obtaining step of obtaining evaluation values of operation result of the industrial device corresponding to a plurality of parameter values of the parameter;
• a holding step of holding the evaluation value obtained in the obtaining step for each object to be processed by the industrial device;
• and
• an optimization step of analyzing the evaluation values held in the holding step, and optimizing the parameter on the basis of at least one of sensitivity representing a change degree of the evaluation value upon the change in the parameter value, and a variation amount of the evaluation values for each object to be processed.

A management apparatus for managing an industrial device, comprising:

• communication means for communicating with the industrial device which operates in accordance with a parameter;
• obtaining means for obtaining evaluation values of operation result of the industrial device corresponding to a plurality of parameter values of the parameter;
• holding means for holding the evaluation values obtained by said obtaining means for each object to be processed by the industrial device;
• and
• optimization means for analyzing the evaluation values held by said holding means, and optimizing the parameter on the basis of at least one of sensitivity representing a change degree of the evaluation value upon the change in the parameter, and a variation amount of the evaluation values for each object to be processed.

An industrial device management method using an apparatus connected via communication means to an industrial device which operates in accordance with a parameter, comprising:

• an obtaining step of obtaining evaluation values of operation result of the industrial device corresponding to a plurality of the parameter values of the parameter;
• a holding step of holding an estimation result of the evaluation value obtained in the obtaining step for each object to be processed by the industrial device;
• and
• an optimization step of analyzing the evaluation values held in the holding step, and optimizing the parameter on the basis of at least one of sensitivity representing a change degree of the evaluation values upon the change in the parameter, and a variation amount of the evaluation values for each object to be processed.