Stage device, method of controlling same, and exposure apparatus
AssigneeCanon Kabushiki Kaisha
InventorHiroaki Takeishi
Life of this patent
Estimating the term…
Abstract
A fine (short-stroke) stage is mounted on an XY slider and is capable of being moved over a minute range in the XY directions. Though the XY slider is moved along the X direction by a Y guide bar, movement along the X direction is decided by an X guide bar. If the relative angle between the direction of the X guide bar and the surface of a bar mirror of the fine stage is represented by α, then the X guide bar will be moved by αx when the XY slider has been moved by x along the X direction by the Y guide bar. After the fine stage is thus positioned, the relative positional relationship between the fine stage and the XY slider is held constant.
Claims17
A stage device comprising:
- a first stage capable of moving in an XY travelling direction in a plane;
- a second stage capable of being moved with respect to said first stage over a minutely small range substantially parallel to direction of movement of said first stage;
- first and second measurement means for respectively measuring positions of said first and second stages independently;
- driving means for driving said first and second stages using measurement values obtained by said first and second measurement means, respectively;
- and
- correction means for correcting drive of said first stage by said driving means, so as to maintain relative positions of said first and second stages, based upon a deviation between an XY direction, which is decided by said second measurement means, and the XY travelling direction of said first stage, and the position of said second stage obtained by said second measurement means.
A method of controlling a stage device having a first stage capable of moving in an XY travelling direction in a plane;
- a second stage capable of being moved with respect to said first stage over a minutely small range substantially parallel to direction of movement of said first stage;
- and first and second measurement means for respectively measuring positions of said first and second stages independently, said method comprising:
- a driving step of driving said first and second stages using measurement values obtained by said first and second measurement means, respectively;
- and
- a correcting step of correcting drive of said first stage by said driving step, so as to maintain relative positions of said first and second stages, based upon a deviation between an XY direction, which is decided by said second measurement means, and the XY travelling direction of said first stage, and the position of said second stage obtained by said second measurement means.
Dependencies are inferred from the claim text.