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US 2003/0201765 A1Published application
Inspection stage having a plurality of Z axes
AssigneeTokyo Electron Limited
InventorKiyoshi Takekoshi
Life of this patent
Estimating the term…
Abstract
An inspection stage including a chuck top, a rectangular Z base, an X stage, a Y stage, and a Z axis elevating mechanism. The chuck top is used for mounting a wafer W. The Z base is provided with the chuck top and is vertically movable. The X stage elevatingly supports the Z base and is movable in an X direction. The Y stage movably supports the X stage in the X direction and is movable in a Y direction. The Z axis elevating mechanism is provided at each of the four corners of the Z base in such a manner as to surround the chuck top.
Claims7
An inspection stage comprising:
- a chuck top on which a work to be tested is mounted, the chuck top including a support;
- at least four Z axes configured to support the support;
- and
- an elevating mechanism configured to vertically drive the support.
1 more element
An inspection stage comprising:
- a chuck top on which a work to be tested is mounted, the chuck top including a support;
- at least four Z axes configured to support the support;
- an elevating mechanism configured to vertically drive the support;
- and
- an X-Y stage on which the elevating mechanism is mounted and which is movable in both an X direction and a Y direction.
2 more elements
Dependencies are inferred from the claim text.