Device and method for photoengraving integrated circuits

A method for encoding prints of chips, comprising the following steps:

• detecting the scan width of the line-array photosource and the number of rows of the chip print's pixels, assuming the scan width being p and the number of the pixel's rows being m;
• according to the serial numbers, equally dividing all rows of the chip print into m/p groups, p rows per group;
• encoding for data of p rows in each group;
• setting up the group index for each group's encoding information;
• and
• saving the encoding information and group index of each group.

A method for scanning-photoengraving integrated circuits, comprising the following steps:

• S1:
• reading the encoding information of an integrated circuit pattern by means of a computer;
• S2:
• adjusting and fixing the distances between the optical heads of the optical-head array by the computer;
• S3:
• placing and roughly positioning a sensitized silicon slice coated with photoresist on the precision working table, removing the working table into the machining range;
• S4:
• respectively auto-focusing each optical head of the optical-head array onto the surface of the silicon slice;
• S5:
• synchronously adjusting and controlling the photosource's on-off state of each optical head of the optical-head array according to the encoding information of the circuit pattern by a computer to form a photoengraving pattern, after reducing the pattern by the micro-imaging system, simultaneously accomplishing the direct-writing photoengraving for all integrated circuit chips on the same silicon slice;
• S6:
• removing the working table out of the machining range and taking out the silicon slice;
• and
• S7:
• performing the processes of diffusing, blending, etc., for the photoengraved silicon slice, accomplishing the fixation of the sensitized pattern.